Patents Assigned to BKS Lab. Ltd.
  • Multiple-shaft power transmission apparatus and wafer transport arm link
    Publication number: 20010012483
    Abstract: The apparatus comprising a partition, a plurality of inner magnetic rings, and a plurality of outer magnetic rings is disclosed. The outer magnetic rings are magnetically coupled to the inner magnetic rings via the partition. The inner magnetic rings comprises a plurality of magnets disposed around a first yoke member. The outer magnetic rings comprise a plurality of magnets disposed around a second yoke member. One or both of the first and second yoke members can be disassembled.
    Type: Application
    Filed: January 31, 2001
    Publication date: August 9, 2001
    Applicant: BKS Lab. Ltd.
    Inventors: Hiroko Kono, Hiromi Kumagai
  • Multiple-shaft power transmission apparatus and wafer transport arm link
    Patent number: 6247889
    Abstract: The apparatus comprising a partition, a plurality of inner magnetic rings, and a plurality of outer magnetic rings is disclosed. The outer magnetic rings are magnetically coupled to the inner magnetic rings via the partition. The inner magnetic rings comprises a plurality of magnets disposed around a first yoke member. The outer magnetic rings comprise a plurality of magnets disposed around a second yoke member. One or both of the first and second yoke members can be disassembled.
    Type: Grant
    Filed: June 4, 1999
    Date of Patent: June 19, 2001
    Assignee: BKS Lab. Ltd.
    Inventors: Hiroko Kono, Hiromi Kumagai