Abstract: A plurality of magnetized elements form a continuous surface proximate to a waveguide opening, sufficient to satisfy electron cyclotron resonance plasma generation. With the elements similarly magnetized in a direction perpendicular to their central axis and parallel to the plane in which they are situated, a continuous resonance surface may be formed without the need for an externally applied magnetic field. Other magnetization orientations, such as perpendicular to the plane of the elements, may require an external magnetic field, such as that derived from solenoidal coils, but of a magnitude substantially reduced due to the combined field supplied by the elements.
Type:
Grant
Filed:
October 25, 1993
Date of Patent:
November 14, 1995
Assignee:
Board of Regents Acting for the Univ. of Michigan