Abstract: Layers of zirconium oxide and another ceramic, such as alumina or silicon carbide, are sequentially deposited on a support to form a nanolaminate containing a thin layer of polycrystalline metastable tetragonal zirconia deposited on the support. A process for making a nanolaminate material of the invention is carried out by sputter deposition. Zirconia is deposited on the chosen support by vacuum sputter deposition under conditions effective to form a thin layer of polycrystalline, metastable tetragonal zirconia on the support. A hard ceramic such as alumina is then deposited on the support by vacuum sputter deposition under conditions effective to form a thin layer of hard ceramic superposed on the zirconia layer.
Type:
Grant
Filed:
June 27, 1994
Date of Patent:
December 5, 1995
Assignee:
Board of Regents of The University of The University of Wisconsin System, on Behalf of The University of Wisconsin-Milwaukee