Patents Assigned to Board of Trustees of the Leland Stanford Junior Univers
  • Patent number: 10060862
    Abstract: A microwave impedance microscope including a tuning fork having a high-aspect ratio etched metal tip electrode extending transversely to one tine of the fork and having a high aspect ratio to thereby reduce parasitic capacitance. The metal tip may be electrochemically etched from a wire, then bonded to the tine. The fork is slightly inclined from the surface of the sample and the tip electrode projects transversely to the fork. A microwave signal is impressed on the tip. Microwave circuitry receives microwave signals reflected from the sample back into the tip and demodulates the reflected signal according to the impressed signal. Further circuitry further demodulates the reflected signal according to the lower-frequency signal causing the fork to oscillate at its mechanically resonant frequency. A multi-wavelength matching circuit interposed between the microwave circuitry and the probe includes a coaxial cable of length half a fundamental microwave wavelength.
    Type: Grant
    Filed: April 5, 2017
    Date of Patent: August 28, 2018
    Assignee: Board of Trustees of the Leland Stanford Junior Univers
    Inventors: Yongtao Cui, Yue Ma, Zhixun Shen