Abstract: Disclosed are methods for fabricating a micro-electro-mechanical switch. The switch has a cantilever arm disposed on a substrate that can be moved in orthogonal directions for latching and unlatching. For latching, the cantilever arm is moved back by a comb-drive actuator and then pulled down by electrodes disposed on the substrate and the cantilever arm. The comb-drive actuator switch is then released and the cantilever arm moves forward to be captured by a dove-tail structure on the substrate. When the voltage is removed, the cantilever arm is held in place by the dove-tail structure. The switch is unlatched by actuating the comb-drive actuator to move the cantilever arm away from the dove-tail structure. The cantilever arm will then pop up once it is released from the dove-tail structure.
Type:
Grant
Filed:
June 27, 2007
Date of Patent:
February 2, 2010
Assignees:
HRL Laboratories, LLC, Boeing
Inventors:
David T. Chang, James H. Schaffner, Tsung-Yuan Hsu, Adele E. Schmitz
Abstract: The present embodiment relates to a catalytic combustor for reducing the pollutant emissions of combustion. The catalytic combustor described herein employs a novel heat exchange system for rapidly and economically bringing the combustor to a temperature wherein catalytic combustion may occur with minimal production of toxic products.