Patents Assigned to Boxer Cross Inc
  • Evaluating a multi-layered structure for voids
    Patent number: 6885444
    Abstract: A method and apparatus measure properties of two layers of a damascene structure (e.g. a silicon wafer during fabrication), and use the two measurements to identify a location as having voids. The two measurements may be used in any manner, e.g. compared to one another, and voids are deemed to be present when the two measurements diverge from each other. In response to the detection of voids, a process parameter used in fabrication of the damascene structure may be changed, to reduce or eliminate voids in to-be-formed structures.
    Type: Grant
    Filed: March 1, 2002
    Date of Patent: April 26, 2005
    Assignee: Boxer Cross Inc
    Inventors: Peter G. Borden, Ji-Ping Li