Abstract: On a glass substrate, a base layer of indium cerium oxide is deposited, and on this a thin copper-containing silver layer, both produced by means of DC sputtering. On top there is another indium cerium oxide layer, which is produced by means of AC-superimposed DC sputter deposition. This layer system boasts very low surface resistivity combined with high transparency in the visible part of the spectrum, which means it has a high Haacke quality factor.
Type:
Grant
Filed:
October 11, 2000
Date of Patent:
June 14, 2005
Assignee:
BPS Alzenau GmbH
Inventors:
Johannes Stollenwerk, Andreas Klöppel, Marcus Bender