Abstract: A method for sterilizing objects with ozone comprises the steps of: positioning the objects in a sterilization chamber (10); effecting an ozone-containing gas atmosphere in the sterilization chamber (10); making the ozone-containing gas circulate via a circulation pipe (20) outside the sterilization room (10), wherein the circulation pipe (20) is provided with an ozone generator (60) and a water mouthpiece (73); establishing an air humidity in a range of approximately 80%; establishing an ozone concentration in the gas higher than 0.2 mgr/l; defining in advance an ozone performance equivalent (OPEQ); measuring the ozone concentration (OC) during the sterilization process on certain measurement moments; calculating the time integral of the measured ozone concentration; wherein the sterilization process is continued until the time integral of the measured ozone concentration is minimally equal to the predetermined ozone performance equivalent.