Patents Assigned to Brewer Science Incorporated
  • Anti-reflective coating conformality control
    Patent number: 6852473
    Abstract: A method for forming an anti-reflective coating on a semiconductor substrate, including providing a first vessel containing an anti-reflective coating component and a second vessel containing a solvent. The anti-reflective coating component from the first vessel and the solvent from the second vessel are supplied to a mixing chamber. The anti-reflective coating component and the solvent are mixed in the mixing chamber to form a product. The product is transferred to the semiconductor substrate. The product is applied to the semiconductor substrate to form the anti-reflective coating. A system for forming an anti-reflective coating on a semiconductor substrate, including a first vessel for containing an anti-reflective coating component and a second vessel for containing a solvent.
    Type: Grant
    Filed: April 28, 2003
    Date of Patent: February 8, 2005
    Assignees: Infineon Technologies Richmond, LP, Brewer Science Incorporated
    Inventors: William Roberts, Marlene Strobl, Paul Williams, Douglas J. Guerrero, Alice F. Martin
  • Anti-reflective coating conformality control
    Publication number: 20040058278
    Abstract: A method for forming an anti-reflective coating on a semiconductor substrate, including providing a first vessel containing an anti-reflective coating component and a second vessel containing a solvent. The anti-reflective coating component from the first vessel and the solvent from the second vessel are supplied to a mixing chamber. The anti-reflective coating component and the solvent are mixed in the mixing chamber to form a product. The product is transferred to the semiconductor substrate. The product is applied to the semiconductor substrate to form the anti-reflective coating. A system for forming an anti-reflective coating on a semiconductor substrate, including a first vessel for containing an anti-reflective coating component and a second vessel for containing a solvent.
    Type: Application
    Filed: April 28, 2003
    Publication date: March 25, 2004
    Applicants: Infineon Technologies Richmond, LP, Brewer Science Incorporated
    Inventors: William Roberts, Marlene Strobl, Paul Williams, Douglas J. Guerrero, Alice F. Martin