Abstract: A method and a device for contactless assessment of the surface quality of a workpiece (W) according to the angle-resolved scattered light measuring technique comprises an optical sensor (10) which illuminates a measuring spot (14). The intensity of the radiation which is reflected back is detected by means of a line sensor (16), and an intensity characteristic value (Ig) is determined therefrom. A horizontal initial rotation angle (?) at which the intensity characteristic value is at a maximum is determined. In a measuring operating mode, surface characteristic values are calculated taking into account this initial rotational angle (?). The measuring method is defined by extremely high lateral and vertical spatial resolution, extending into the subnanometer range, and by a high measuring speed.

Abstract: A method and a device for contactless assessment of the surface quality of a workpiece (W) according to the angle-resolved scattered light measuring technique comprises an optical sensor (10) which illuminates a measuring spot (14). The intensity of the radiation which is reflected back is detected by means of a line sensor (16), and an intensity characteristic value (Ig) is determined therefrom. A horizontal initial rotation angle (?) at which the intensity characteristic value is at a maximum is determined. In a measuring operating mode, surface characteristic values are calculated taking into account this initial rotational angle (?). The measuring method is defined by extremely high lateral and vertical spatial resolution, extending into the subnanometer range, and by a high measuring speed.