Abstract: A reticle compartment defining an enclosed interior adapted to store at least two reticles in a resticle storage portion, including an inlet port, through which a purge gas can enter the enclosed enterior, and an outlet port, through which the purge gas can exit the enclosed interior, wherein the reticle compartment further includes a first diffusor plate arranged in the enclosed interior between the inlet port and the reticle storage portion, wherein the first diffusor plate is provided with openings, through which the purge gas can flow, the openings in a central section of the first diffusor plate being provided with a larger individual opening area and/or providing a large total opening area per unit area than openings in a peripheral section of the first diffusor plate.

Abstract: In an embodiment, the present invention discloses a stackable substrate carrier for scalably storing, transporting or processing multiple substrates. The present substrate carriers can be stacked side-by-side by an attaching mechanism, forming an integrated carrier with double, triple or multiple capacity. The attaching mechanism comprises a locking mechanism to secure the substrate carriers together, engaged by mating two substrate carriers, together with an additional rotating or translating action of the two substrate carriers. Alternatively, the locking mechanism can be engaged by pressing two substrate carriers against each other, using friction to keep the carriers together. Other locking mechanism can also be used, such as hooks or latches.

Abstract: The present disclosure relates to a method for inspecting a container body adapted and configured to hold substrates, comprising the steps of directing light from a light source onto a reflector element positioned within an interior space of the container body, such that the light is reflected to illuminate at least one interior surface of the container body, wherein the light is reflected by the reflector element in a diffuse manner and generating at least one image of the at least one interior surface by means of at least one camera, and evaluating the state of the container body on the basis of the at least one image.

Abstract: A redundantable robotic mechanism is disclosed for improving reliability of tranport equipment. The redundantable robot assembly typically comprises independent robots with separate controls, motors, linkage arms, or power, thus providing the capability of operation even if parts of the assembly are not operational or when parts of the assembly are removed for repair. The redundantable robot assembly can be also designed to allow in-situ servicing, e.g. servicing one robot when the other is running. The disclosed redundantable robot assembly provides virtual uninterrupted process flow, and thus greatly increases the yield for the manufacturing facility.

Abstract: An integrated robotic mechanism is disclosed for improving transport equipment, integrating an object movement with other functionalities such as alignment or identification. The disclosed integrated robot assembly can comprise a multiple end effector for moving a plurality of workpieces, a single end effector for moving a single workpiece, a rotation chuck incorporated on the robot body to provide alignment capability, and an optional identification subsystem for identify the object during transport. The present invention robot assembly can be used in a sorter or stocker equipment, in processing equipment, and a transfer system.

Abstract: A device for coupling containers at a loading and unloading port with a horizontally displaceable platform for receiving the container has the object of increasing protection against faulty operation and faulty loading in a simple manner while guaranteeing technical cleanroom requirements and without limiting the clear space of the platform. An arrangement for detecting the presence of a container and for distinguishing between containers with different contents is provided for an expectancy area above the platform. The device is used for the loading and unloading at machining or processing stations of objects that are to be transported in a container, especially objects in the fabrication process for integrated circuits.

Abstract: In a device for controlling the drive of mechanisms operating separately from one another, the object is to minimize the operating effort and expense of driving alternatively operating mechanisms. Furthermore, it is ensured by the device that the mechanisms are only allowed to be put into operation if they are in a specific state and that this state is maintained throughout their operation. The device has power transmission capabilities different from one another for adjusting the control system to different states of the mechanisms. Arrangements provided for this purpose operate in different settings, determined by control signals, of which a first setting prevents a power transmission and further settings respectively permit power transmission to one of the mechanisms. The arrangement for power transmission is equipped with a signal-receiving device, with which a reception of the control signals dependent on the state of the mechanisms takes place.

Abstract: A module for use in a system for processing articles, in which the system includes a plurality of machine tools for processing articles, a pod for carrying the articles to be processed by the machine tools from one machine tool to another, a host processing controller associated with the machine tools for controlling the operation thereof, a robot connected to each machine tool for receiving a pod, opening the pod and for transporting the articles from within the pod into position on the machine tool for processing. An identification device is carried by the pod for identifying a particular pod and the articles carried in the pod. The module includes a single wire connection between the identification system, the host controller and the robot. The module has a microprocessor to identify the source of a signal and for routing the signal between the identification system and the host controller and between the host controller and the robot depending on its source.

Abstract: A device and a method for detecting and distinguishing between shelf-forming supports in cassettes and disk-shaped objects deposited thereon are provided for increasing accuracy in the determination of the position of shelves and objects as well as reliability of detection in distinguishing between cassette types without a disruptive influence being exerted on the objects by the inserted protective supports. The objects and different types of supports for the objects which are distinguished through an offset arrangement in the measurement plane pass through measurement beam bundles with their end sides, wherein each of the measurement beam bundles is situated in the region of only one type of support. The extension of the end sides of the supports in the measurement plane is completely detected by the measurement beam bundle. The device is used for the fabrication of integrated circuits.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.

Abstract: A device and method for the sensing of wafer-shaped objects and shelves in a container is disclosed. The device and method function to increase the reliability of detection in containers which are open on one side as well as in containers which are open on two sides, and to detect whether a shelf is occupied by more than one object, to detect oblique positions of the objects along several shelves and the position of the shelves themselves independent from dimensional tolerances without impeding the handling of either the wafer-shaped objects or the container and without interfering with clean room conditions. Radiation from a radiation source which is reflected at the front sides of the objects and at the shelves is directed to optoelectronic sensor elements for recording an image by an imaging optical device. The recording of every image is adapted to the reflectance ratios at the front sides which contribute to the imaging. The device and method is applicable in the manufacture of integrated circuits.

Abstract: In a device for controlling the drive of mechanisms operating separately from one another, the object is to minimize the operating effort and expense of driving alternatively operating mechanisms. Furthermore, it is ensured by the device that the mechanisms are only allowed to be put into operation if they are in a specific state and that this state is maintained throughout their operation. The device has power transmission capabilities different from one another for adjusting the control system to different states of the mechanisms. Arrangements provided for this purpose operate in different settings, determined by control signals, of which a first setting prevents a power transmission and further settings respectively permit power transmission to one of the mechanisms. The arrangement for power transmission is equipped with a signal-receiving device, with which a reception of the control signals dependent on the state of the mechanisms takes place.

Abstract: A device for transferring an object between at least two locations with a gripper which grips the object at a handle element after it approaches the object with gripper elements has the aim of preventing deformation or destruction of the object during the approach of the gripper. This should minimize particle generation resulting from firm holding. The gripper has a sensor for detecting the object and its distance during approach, wherein the time at which the object is detected defines the determination of the remaining approach path for a controlled approach and the start of the gripping process.

Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.