Patents Assigned to Brooks Automation, Incorporated
  • Fast swap dual substrate transport for load lock
    Patent number: 6918731
    Abstract: A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber without the need for a central transport robot. The load lock transport is a dual element robot designed for minimum clearance and space and operates within a matching load lock chamber of minimum volume.
    Type: Grant
    Filed: July 2, 2001
    Date of Patent: July 19, 2005
    Assignee: Brooks Automation, Incorporated
    Inventor: Mark A. Talmer