Patents Assigned to Brooks CCS GmbH
  • Integrated gripper for workpiece transfer
    Patent number: 9701024
    Abstract: An integrated grip arm for transfer reticles and carrier boxes is disclosed for improving throughput, yield and reliability of transport equipment. The integrated grip arm comprises a plurality of grippers to accommodate a plurality of reticles and carrier boxes without the need of separate arm or gripper changes. The integrated grip arm can further comprise sensor or means to select the right gripper for the right reticles or carrier boxes.
    Type: Grant
    Filed: February 16, 2014
    Date of Patent: July 11, 2017
    Assignee: Brooks CCS GmbH
    Inventor: Lutz Rebstock