Abstract: System and methods for solder flux removal from a gas stream is disclosed. In one aspect, the system includes: a scrubber chamber having a gas inlet and a gas outlet through which the gas stream is introduced into and withdrawn from the scrubber chamber; at least one rinse agent delivery mechanism for introducing a rinse agent into the scrubber chamber for contact with the gas stream, the rinse agent being at a temperature for condensing a first portion of the flux from the gas stream; a condenser portion of the scrubber chamber containing the rinse agent for receiving the gas stream, the rinse agent being at a temperature for condensing a second portion of the flux in the gas stream; and a condensed flux removal apparatus adapted for removal from the scrubber chamber of at least a portion of the rinse agent and the flux which has condensed.

Abstract: Systems, devices and methods for effluent or flux removal from a gas are disclosed. In one aspect the system includes at least one tube having a body including an interior passageway enabling fluidic flow therethrough; and a plurality of openings disposed along a length of the body in fluidic communication with the interior passageway, thereby enabling withdrawal of the gas laden with the effluent exterior to the at least one tube through the plurality of openings into the interior passageway of the at least one tube.

Abstract: System and methods for solder flux removal from a gas stream is disclosed. In one aspect, the system includes: a scrubber chamber having a gas inlet and a gas outlet through which the gas stream is introduced into and withdrawn from the scrubber chamber; at least one rinse agent delivery mechanism for introducing a rinse agent into the scrubber chamber for contact with the gas stream, the rinse agent being at a temperature for condensing a first portion of the flux from the gas stream; a condenser portion of the scrubber chamber containing the rinse agent for receiving the gas stream, the rinse agent being at a temperature for condensing a second portion of the flux in the gas stream; and a condensed flux removal apparatus adapted for removal from the scrubber chamber of at least a portion of the rinse agent and the flux which has condensed.

Abstract: A furnace system for thermal processing of products and materials is disclosed which is particularly useful in processing touch screens for computer tablets and silicon wafers employed in fabricating solar cells. The system employs a hybrid of microwave and radiant heating of workpieces to provide controlled heating of the workpieces. A plurality of susceptors are disposed a furnace chamber. A plurality of microwave sources are arranged to provide microwave radiation in the chamber to uniformly heat workpieces in the chamber and to provide uniform heating of the susceptors. The susceptors are effective upon microwave heating by the microwave sources to provide uniform radiant heating of the workpieces in the chamber.

Abstract: A high temperature conveyor belt is provided having a non-metallic conveying surface which will not scratch, abrade or otherwise mar the surface of a product being carried on the belt through a furnace and which will not contaminate the product. In one embodiment, the conveyor comprises a high temperature fabric belt attached to a metal belt which may be a conventional woven metal conveyor belt. In another embodiment, the conveyor is composed of a non-metallic high temperature strand which is woven or threaded through a metal belt to provide a non-metallic conveying surface. In a further embodiment, the non-metallic product support elements are coupled to roller chains at each side of the furnace chamber and which are cooperative with a drive mechanism to transport the conveyor through the furnace. The roller chains can be located outside of the furnace chamber to avoid exposure to the high temperature of the furnace chamber.

Abstract: A high temperature conveyor belt is provided having a non-metallic conveying surface which will not scratch, abrade or otherwise mar the surface of a product being carried on the belt through a furnace and which will not contaminate the product. In one embodiment, the conveyor comprises a high temperature fabric belt attached to a metal belt which may be a conventional woven metal conveyor belt. In another embodiment, the conveyor is composed of a non-metallic high temperature strand which is woven or threaded through a metal belt to provide a non-metallic conveying surface. In a further embodiment, the non-metallic product support elements are coupled to roller chains at each side of the furnace chamber and which are cooperative with a drive mechanism to transport the conveyor through the furnace. The roller chains can be located outside of the furnace chamber to avoid exposure to the high temperature of the furnace chamber.

Abstract: A method is provided for the simultaneous diffusion of dopants of different types on respective sides of a solar cell wafer in a single stage process. The dopants are applied to respective sides of the wafer in wet chemical form preferably by pad printing. The doping materials can be applied to the entire wafer surface or effective area thereof, or can be applied in a pattern to suit the intended solar cell configuration. In a typical embodiment, the dopants are boron and phosphorus.

Abstract: An infrared furnace system provides for adjusting the amount of time a workpiece spends in a respective section of the furnace while at the same time minimizing the footprint, i.e., the amount of floor space that the furnace uses. Various embodiments allow for optimizing the required thermal duration of each section which then also optimizes the heating and/or cooling profile within each section. Transfer conveyors are provided to transfer a workpiece from one conveyor operating at a first speed to a second conveyor operating at a second speed, different from the first speed in order to prevent damage to the workpiece. Rollers are provided to support the workpiece and to maintain a proper orientation. A heating lamp support assembly provides power to the lamp and facilitates exchange and replacement of the lamp. An air delivery system provides process gas maintained at the correct temperature. An exhaust system provides air flow with improved turnover and reduced noise considerations.

Abstract: A furnace system for thermal processing of products and materials is disclosed which is particularly useful in processing touch screens for computer tablets and silicon wafers employed in fabricating solar cells. The system employs a hybrid of microwave and radiant heating of workpieces to provide controlled heating of the workpieces. A plurality of susceptors are disposed a furnace chamber. A plurality of microwave sources are arranged to provide microwave radiation in the chamber to uniformly heat workpieces in the chamber and to provide uniform heating of the susceptors. The susceptors are effective upon microwave heating by the microwave sources to provide uniform radiant heating of the workpieces in the chamber.

Abstract: An infrared firing furnace includes a case-integrated cooling system to provide high performance cooling as the first step in the cooling process. The cooling system includes a cooling manifold integrated into, and made from, the same case material as the adjacent firing zone. As the cooling system is made from the same material as the rest of the case, it can handle being exposed to higher temperatures. The cooling system is positioned such that the plane of its outlet is at a specific clearance level relative to the product passing underneath. High pressure cooling jets of air are directed downward toward the products as they pass under the cooling manifold in order to quickly bring the temperature of the products down from the much higher firing temperature, and minimize the dwell time of the product at the higher temperature.

Abstract: A high temperature conveyor belt is provided having a non-metallic conveying surface which will not scratch, abrade or otherwise mar the surface of a product being carried on the belt through a furnace and which will not contaminate the product. In one embodiment, the conveyor comprises a high temperature fabric belt attached to a metal belt which may be a conventional woven metal conveyor belt. In another embodiment, the conveyor is composed of a non-metallic high temperature strand which is woven or threaded through a metal belt to provide a non-metallic conveying surface. In a further embodiment, the non-metallic product support elements are coupled to roller chains at each side of the furnace chamber and which are cooperative with a drive mechanism to transport the conveyor through the furnace. The roller chains can be located outside of the furnace chamber to avoid exposure to the high temperature of the furnace chamber.

Abstract: An apparatus and a method comprising same for removing metal oxides from a substrate surface are disclosed herein. In one particular embodiment, the apparatus comprises an electrode assembly that has a housing that is at least partially comprised of an insulating material and having an internal volume and at least one fluid inlet that is in fluid communication with the internal volume; a conductive base connected to the housing comprising a plurality of conductive tips that extend therefrom into a target area and a plurality of perforations that extend therethrough and are in fluid communication with the internal volume to allow for a passage of a gas mixture comprising a reducing gas.

Abstract: A multizone convection furnace is provided in which gas from a cooling chamber of the furnace is directed into one or more heat zones of the furnace for the purpose of providing a specified thermal profile. The gas introduced from the cooling chamber into the one or more heat zones is of the same type of gas present in the heat zones, and typically is nitrogen. In a preferred embodiment, the convection furnaces comprises a heating chamber composed of a plurality of adjacent heat zones and a cooling chamber at the exit end of the heating chamber. A conveyer extends through the furnace for movement of a product through the heat zones and cooling chamber of the furnace. The cooling chamber is coupled to one or more of the heat zones such that cooled gas from the cooling chamber can be introduced into selected heat zones. In one version, a cooled gas path is provided to all of the heat zones and cooled gas is introduced into intended zones by opening associated valves.

Abstract: An apparatus and a method comprising same for removing metal oxides from a substrate surface are disclosed herein. In one particular embodiment, the apparatus comprises an electrode assembly that has a housing that is at least partially comprised of an insulating material and having an internal volume and at least one fluid inlet that is in fluid communication with the internal volume; a conductive base connected to the housing comprising a plurality of conductive tips that extend therefrom into a target area and a plurality of perforations that extend therethrough and are in fluid communication with the internal volume to allow for a passage of a gas mixture comprising a reducing gas.

Abstract: A microwave combustion system is presented that can replace the conventional spark plug in an internal combustion engine. One or more microwave pulses are provided to a microwave feed in a plug that sits in the cylinder. A microwave generated plasma generated by the plug in the vicinity of a fuel mixture can provide for highly efficient combustion of the fuel-air mixture.

Abstract: Methods and apparatus for plasma-assisted heat treatments are provided. The method can include initiating a heat treating plasma within a cavity (14) by subjecting a gas to electromagnetic radiation in the presence of a plasma catalyst (70), heating the object by exposing the object to the plasma, and maintaining exposure of the object to the plasma for a sufficient period to alter at least one material property of the object.

Abstract: Methods and apparatus are provided for igniting, modulating, and sustaining a plasma for various plasma processes and treatments. In one embodiment, a plasma is ignited by subjecting a gas in a multi-mode processing cavity to electromagnetic radiation having a frequency between about 1 MHz and about 333 GHz in the presence of a plasma catalyst, which may be passive or active. A passive plasma catalyst may include, for example, any object capable of inducing a plasma by deforming a local electric field. An active plasma catalyst can include any particle or high energy wave packet capable of transferring a sufficient amount of energy to a gaseous atom or molecule to remove at least one electron from the gaseous atom or molecule, in the presence of electromagnetic radiation.

Abstract: Plasma-assisted methods and apparatus that use multiple radiation sources are provided. In one embodiment, a plasma is ignited by subjecting a gas in a radiation cavity to electromagnetic radiation having a frequency less than about 333 GHz in the presence of a plasma catalyst, which may be passive or active. A controller can be used to delay activation of one radiation source with respect to another radiation source.

Abstract: Methods and apparatus are provided for plasma-assisted processing multiple work pieces in a manufacturing line. In one embodiment, the method can include placing the work pieces in movable carriers, moving the carriers on a conveyor into an irradiation zone, flowing a gas into the irradiation zone, igniting the gas in the irradiation zone to form a plasma (e.g., by subjecting the gas to electromagnetic radiation in the presence of a plasma catalyst), sustaining the plasma for a period of time sufficient to at least partially plasma process at least one of the work pieces in the irradiation zone, and advancing the conveyor to move the at least one plasma-processed work piece out of the irradiation zone. Various types of plasma catalysts are also provided.

Abstract: Methods and apparatus are provided for igniting, modulating, and sustaining a plasma (615) for coating objects (250). In one embodiment, a method of coating a surface of an object (250) includes forming a plasma (615) in a cavity (230) by subjecting a gas to electromagnetic radiation in the presence of a plasma catalyst (240) and adding at least one coating material (510) to the plasma (615) by energizing the material (510) with, for example, a laser (500). The material (510) is allowed to deposit on the surface of the object (250) to form a coating. Various types of plasma (240) catalysts are also provided.