Abstract: In a micro diaphragm pump which has a pump body consisting of two parts, one part including two valve chambers with a pump chamber disposed therebetween and in communication with the valve chambers by passages, a diaphragm extends across and closes the chambers and forms, in the areas of the valve chambers, valve membranes for inlet and outlet valves which are integrally formed, both on one side of the diaphragm, both pump body parts being sealingly connected to the diaphragm.

Abstract: A method of producing microstructures having regions of different structural height includes providing a layer of positive resist material that is sensitive to X-ray radiation with microstructures on a side facing a source of X-rays. Using a mask, the layer of a positive resist material is partially irradiated with the X-rays. The irradiated regions are removed with the aid of a developer.

Abstract: The plate-like valve elements (10 and 20) of the microvalve are provided with a plurality of valve seats and, respectively, corresponding valve members. The sealing surfaces of a secondary valve element (10) are respectively formed by molding to copy the sealing faces of a primary valve element (20) so that the sealing surfaces of both valve elements are completely complementary to each other. The sealing surfaces need no further processing such as machining. Despite liberal tolerances of manufacture a high precision register of the valve elements in relation to each other is ensured.

Abstract: A valve plate (14) provided with slot-like valve ports (16) is able to slide between two stationary valve plates (10 and 12) which are joined with each other and are provided with corresponding slot-like valve ports (16). A electrostatic drive is integrated in the valve plates (10, 12 and 14). It consists of strip-like electrodes (20 and 22) which are arranged opposite to corresponding electrodes of another valve plate. By the application of suitable actuating potentials with the same or opposite polarity to the electrodes of different valve plates the actuating forces may be produced, which are needed for moving the movable valve plate (14).

Abstract: The multi-way valve comprises two valve seats (12, 14) formed in the valve chamber whose seat surfaces are parallel. Two closing bodies (22, 24) cooperating with one of these valve seats (12, 14) respectively are attached to both ends of an elongated actuating member (20). To this actuating member (20) there is attached the one end of an elastic lamella (18) whose other end (18A) is braced at the valve chamber (10). The actuating member (20) may swivel rocker-like around a swivel axis (28) which is not fixed in space. Although no direct guide for the actuating member (20) is provided, a precise guiding largely free from tolerances is guaranteed so that the drive power required is low.

Abstract: A magnetically operated valve having a permanent magnet with constant remanence wherein the permanent magnet is formed with an annular configuration and is located in one end of a tubular core guide member which operates to guide a movable core member forming the valve body. The permanent magnet is produced from a rare earth/cobalt alloy and secures the valve in at least one of a plurality of switched positions and a ferromagnetic circuit is formed with sheet metal sheets extending to form the outer portion of the ferromagnetic circuit with the movable core member forming the inner part thereof. The permanent magnet is inserted in cutout portions of the sheet metal sheets which form the outer part of the ferromagnetic circuit.

Abstract: The magnetic valve with electronic control for increasing the attractive output has an energizing coil (AE), which is supplied in the attracting phase with an increased energizing current via a closed switch (T2). In the maintenance phase, the energizing coil (AE) is supplied with a maintenance current, via a compensating resistor (RV) and with the switch (T2) opened, which is lower than the energizing current. For the purpose of controlling the switch (T2), a timing circuit is provided which includes a resistor (R2) and a capacitor (C2). The magnetic valve is selectively drivable with alternating current or direct current. A portion of the energizing coil (AE) is made up of the compensating resistor (RV), which is embodied as a resistor wire and wound up on the energizing coil (AE).

Abstract: An electromagnetic valve for handling fluid media has a valve mechanism which includes at least one valve seat and a valve-closing member which cooperates with the valve seat or seats. The motion of the valve-closing member is controlled by linkage that is connected to the moving arm of an electromagnet, while a return spring urges the armature in the direction opposite to the magnetic force. In order to permit the seating of the armature against a stop at the limit of its energized travel, while exerting a calibrated force on the valve seat, the armature is permitted to travel beyond the point at which the valve-closing member is arrested. The additional motion of the armature takes place against the force of an auxiliary spring which compresses during that part of the motion. When the coil is de-energized, the auxiliary spring urges the armature back into direct contact with the linkage, whereafter the motion transfer is loss-free.

Abstract: There is provided a control valve arrangement for dental equipment which comprises a plurality of modular type assemblies having at least three functional zones with the modules including inter-connecting passageways and disposed so as to handle a plurality of separately controlled pressurized media. Provision is also made to rotate a particular module about an X axis to modify the operation of that module.

Abstract: An electromagnetic valve is equipped with a signal generator which operates in dependence on the positions assumed by the internal valve mechanism and which represents a relatively small unit which is attached in various positions to the housing of the magnetic actuator mechanism of the valve. The signal generator has at least one electrical switch which is actuated mechanically by a pin which transmits the motions of the armature to the switch without any appreciable interference with the operation of the magnetic mechanism. The switch is mounted within a housing on an insert which may be located in various positions relative to the housing and may suitably be a microswitch. Thesignal generator housing is sealingly attached to a mounting bracket which, in turn, is mounted on the housing of the magnetic actuator of the valve. The passage of the actuating pin is sealed against the outside by appropriate seals.

Abstract: Plastic seals for use in valves which handle chemically reactive and aggressive media are described. These seals have a base layer made from porous PTFE and a covering layer of smooth, dense PTFE. The two layers are suitably sintered together. The seal is held in a seal holder which may be injection molded around the seal and may be made from a similar material. During the production of the base layer, the PTFE material is mixed with a flushable filler material which leaves a structure of pores in the layer after removal. These pores impart to the base layer an elastic property.A method for joining the seal to the seal carrier and a method for forming annular seals are also described.