Abstract: In a micro diaphragm pump which has a pump body consisting of two parts, one part including two valve chambers with a pump chamber disposed therebetween and in communication with the valve chambers by passages, a diaphragm extends across and closes the chambers and forms, in the areas of the valve chambers, valve membranes for inlet and outlet valves which are integrally formed, both on one side of the diaphragm, both pump body parts being sealingly connected to the diaphragm.
Type:
Grant
Filed:
March 15, 1996
Date of Patent:
February 17, 1998
Assignees:
Forschungszentrum Karlsruhe GmbH, Burkert GmbH & Co. KG
Inventors:
Richard Rapp, Helmut Kalb, Walter Stark, Dieter Seidel, Hans Biedermann