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Patents
Patents Assigned to BVBA VANDERSTRAETEN
Patents Assigned to BVBA VANDERSTRAETEN
Sputtering targets and method for the preparation thereof
Publication number:
20020125129
Abstract:
Sputtering targets comprising sub-stoichiometric titanium dioxide, TiOx, where x is below 2, are provided. The targets are preferably formed by plasma spraying so as to have an electrical resistivity of less than 0.5 ohm.cm.
Type:
Application
Filed:
December 7, 2001
Publication date:
September 12, 2002
Applicant:
BVBA VANDERSTRAETEN
Inventor:
Johan Emile Vanderstraeten