Abstract: Methods of and apparatus for inspecting composite layers of a first material formed on a second material are provided including providing an illumination source, illuminating at least a portion of the composite at the layer, receiving light reflected from the sample, determining a spectral response from the received light, and comparing the received spectral response to an expected spectral response.
Type:
Grant
Filed:
August 31, 2020
Date of Patent:
February 1, 2022
Assignees:
BWXT Nuclear Operations Group, Inc., BWXT NOG Technologies, Inc.
Inventors:
Aaron C. Havener, James D. Jogerst, Thomas C. Mohr, Keith B. Rider
Abstract: Methods of and apparatus for inspecting composite layers of a first material formed on a second material are provided including providing an illumination source, illuminating at least a portion of the composite at the layer, receiving light reflected from the sample, determining a spectral response from the received light, and comparing the received spectral response to an expected spectral response.
Type:
Grant
Filed:
February 26, 2019
Date of Patent:
September 1, 2020
Assignees:
BWXT Nuclear Operations Group, Inc., BWXT NOG Technologies, Inc.
Inventors:
Aaron C. Havener, James D. Jogerst, Thomas C. Mohr, Keith B. Rider