Abstract: The present invention: continuously measures pressure in real time by means of pressure detection sensors inside a vessel and inside chemical piping and quickly discharges air when abnormal pressure is generated, so as to stably supply a crude liquid through a fixed pressure-maintaining liquid supply part; checks a standard concentration after the crude liquid is mixed so as to re-transfer the mixed liquid to a mixing tank unit when the concentration thereof does not reach the reference concentration, thereby spraying the mixed liquid through a jet nozzle member; and shortens the mixing time of primarily mixed liquid so as to enable the mixed liquid to be mass-produced and a stable quality thereof to be ensured.

Abstract: A chemical liquid feeding device for feeding chemical liquid used in a semiconductor fabrication process. The device includes three or more pumps arranged in a line. Each pump has different time points of suction stroke and discharge stroke so that the chemical liquid can be fed uniformly without pulsation.

Abstract: The present invention relates to a chemical liquid feeding device for feeding chemical liquid required in a semiconductor fabrication process, which includes three or more pumps arranged in a line, each pump having different time points of suction stroke an discharge stroke from one another so that the chemical liquid can be fed uniformly without pulsation.