Patents Assigned to C/O GIGAPHOTON INC.
  • LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    Publication number: 20150351208
    Abstract: There may be included: a master oscillator configured to output pulsed laser light; a power amplifier disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and a wavelength filter disposed between the master oscillator and the power amplifier in the optical path of the pulsed laser light, and configured to allow the pulsed laser light to pass therethrough and suppress transmission of light with a wavelength other than a wavelength of the pulsed laser light.
    Type: Application
    Filed: June 11, 2015
    Publication date: December 3, 2015
    Applicant: c/o GIGAPHOTON INC.
    Inventors: Takashi SUGANUMA, Toru SUZUKI, Takahisa FUJIMAKI, Yoshiaki KUROSAWA
  • LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
    Publication number: 20150340838
    Abstract: There may be included: a master oscillator configured to output pulsed laser light; two or more power amplifiers disposed in an optical path of the pulsed laser light to amplify the pulsed laser light; and an optical isolator provided between adjacent two of the power amplifiers in the optical path of the pulsed laser light, and configured to suppress transmission of light traveling from the power amplifiers to a side where the master oscillator is provided.
    Type: Application
    Filed: June 24, 2015
    Publication date: November 26, 2015
    Applicant: C/O GIGAPHOTON INC.
    Inventors: Masato MORIYA, Takashi SUGANUMA, Osamu WAKABAYASHI