Abstract: A coupler which connects a nipple provided on a cylinder valve of a gas supply line in a semiconductor process to an operating fluid supply line, includes: a first inlet port connected to the operating fluid supply line; a housing having a first cavity that is in communication with the first inlet port; at least one ball which is engaged with a ring-shaped engaging recess formed around a connection portion of the nipple; and a pipe portion which is installed in the first cavity and regulates a second cavity in which the connection portion of the nipple is inserted.

Abstract: The present specification discloses a method for monitoring a mobile asset by using a sensing terminal which comprises: a coupling unit for coupling an object of interest to the housing; a sensor unit for generating sensing data for the object of interest; a processor for generating, on the basis of the sensing data, transmission unit data to be transmitted to a server; and a communication unit for transmitting the transmission unit data to the server.

Abstract: The present invention relates to a composite sintering materials using a carbon nanotube (including carbide nano particles, hereinafter the same) and a manufacturing method thereof, the method comprises the steps of: combining or generating carbon nanotubes in metal powders, a compacted product, or a sintered product; growing and alloying the carbon nanotubes by compacting or sintering the metal powders, the compacted product, or the sintered product; and strengthening the mechanical characteristics by repeatedly performing the sintering process and the combining process or the generating process of the carbon nanotubes.

Abstract: The present invention relates to a manufacturing method of composite sintering materials using a carbon nanotube comprises the steps of; pressing metal power to obtain a predetermined form, heating the predetermined form in an atmosphere of nitrogen gas for sintering, dipping and heating a sintered product obtained by the sintering process to an organic solution dispersed with a carbon nanotube to combine the carbon nanotube for generating the carbon nanotube, and sintering the sintered product in an atmosphere of nitrogen gas for re-sintering to grow the generated carbon nanotube. The composite sintering materials using carbon nanotubes of the present invention have excellent mechanical, thermal, and electric and electronic characteristics as well as have effects of material cost reduction and manufacturing cost reduction due to reduced sintering temperature.

Abstract: The present invention relates to a manufacturing method of composite sintering materials using a carbon nanotube comprises the steps of; dipping diluted HF solution, natal, or phosphoric acid along with a carbon nanotube solution dispersed to metal power, forming a predetermined form by pressing the master alloys, sintering the predetermined form in an atmosphere of nitrogen gas to grow the carbon nanotube, generating the carbon nanotube in the pores of the predetermined form by inserting ammonia, carbon dioxide carbonated water, acetylene, methane, methanol, or benzene to the sintered product in an inert gas atmosphere of a temperature about 1200° C. to add a toughness; and re-sintering the sintered product in which the carbon nanotube is generated in the atmosphere of nitrogen gas to growth the carbon nanotube.

Abstract: The present invention relates to a composite sintering materials using a carbon nanotube (including carbide nano particles, hereinafter the same) and a manufacturing method thereof, the method comprises the steps of: combining or generating carbon nanotubes in metal powers, a compacted product, or a sintered product; growing and alloying the carbon nanotubes by compacting or sintering the metal powers, the compacted product, or the sintered product; and strengthening the mechanical characteristics by repeatedly performing the sintering process and the combining process or the generating process of the carbon nanotubes.

Abstract: The present invention relates to a composite sintering materials using a carbon nanotube (including carbide nano particles, hereinafter the same) and a manufacturing method thereof, the method comprises the steps of: combining or generating carbon 5 nanotubes in metal powers, a compacted product, or a sintered product; growing and alloying the carbon nanotubes by compacting or sintering the metal powers, the compacted product, or the sintered product; and strengthening the mechanical characteristics by repeatedly performing the sintering process and the combining process or the generating process of the carbon nanotubes.

Abstract: The invention concerns an apparatus for cleaning the edge of a wafer that may be relatively simply constructed with low cost, and prevent the wafer from being re-contaminated by the edge cleaning, thus resulting in increase of the yield rate of wafers. The apparatus includes a cleaning agent ejection nozzle body provided on a side part of a chuck for ejecting a particulate cleaning agent (CO2 particles) towards the side and the edge portions of the wafer held and rotated by the chuck, and a nozzle body carriage for moving the nozzle body between rest and cleaning positions.