Patents Assigned to Cabot Microeletronics Corporation
  • WIRE SAW SLURRY RECYCLING PROCESS
    Publication number: 20090293369
    Abstract: The present invention provides a method of recycling a water-based wire saw cutting slurry waste fluid comprising abrasive particles and waste solids in a water-based carrier.
    Type: Application
    Filed: June 1, 2009
    Publication date: December 3, 2009
    Applicant: Cabot Microeletronics Corporation
    Inventors: Gregory GAUDET, Steven Grumbine, Nevin Naguib, Francois Batllo