Abstract: An object transfer function for a sample object is determined on the basis of a reference measurement. Subsequently, an optimization is carried out in order to find an optimized illumination geometry on the basis of the object transfer function and an optical transfer function for an optical unit.
Type:
Grant
Filed:
March 2, 2018
Date of Patent:
July 26, 2022
Assignee:
Cad Zeiss Microscopy GmbH
Inventors:
Benedict Diederich, Rolf Wartmann, Harald Schadwinkel, Lars Stoppe
Abstract: Various aspects of the invention relate to techniques to facilitate autofocus techniques for a test object by means of an angle-variable illumination. Here, image datasets are captured at a multiplicity of angle-variable illumination geometries. The captured image datsets are evaluated in order to determine the Z-position.
Type:
Grant
Filed:
March 28, 2019
Date of Patent:
March 23, 2021
Assignee:
Cad Zeiss Microscopy GmbH
Inventors:
Lars Stoppe, Thomas Ohrt, Christian Dietrich, Markus Sticker