Abstract: A method and apparatus are described that may be used to provide decoupled rotation of structures about different pivot points. The apparatus may include one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended. Separate movable blades may be provided for each degree of freedom. When voltage is applied between the fixed and movable blades, the electrostatic attraction generates a force attracting movable blades toward blades that are fixed relative to the moveable blades, causing a structure to rotate about the flexures. The angle of rotation that results may be related to the size, number and spacing of the blades, the stiffness of the flexures and the magnitude of the voltage difference applied to the blades. The blades are fabricated using deep silicon etching.

Abstract: An apparatus and method of controlling optical loss in an optical switch to equalize optical power or loss in a group of optical signals in an optical transmission system relatively insensitive to mechanical vibration. In one embodiment a group of optical signals is input into an optical switch and selected optical signals are variably attenuated using synchronized control to two mirrors in order to provide more uniform power distribution among the group of optical signals without enhancing vibration sensitivity of the optical switch.

Abstract: A system is provided to obtain loss optimized output optical power by way of feedback control and stabilization in an optical signal switching or routing system. The optical signal switching or routing system includes at least two input optical fibers and at least two output optical fibers, a controllable mechanism for directing an optical beam from one of the input optical fibers to one of the output optical fibers, and a mechanism for measuring the optical power applied to output optical fiber. The measuring mechanism provides a measure of the output optical power through a signal processing apparatus to a control apparatus. Possible other inputs to the signal processing apparatus include the input optical power, test optical power, etc. The inputs to the signal processing apparatus are compared and the signal processing apparatus outputs a signal to the control apparatus to provide optimized output power.

Abstract: A method of moving reflectors in an optical cross-connect switch. In one embodiment, the optical cross-connect switch identifies a reflector path avoiding possible interference with other reflectors, predicts the reflector path from pre-computed tables, and moves the reflector in a straight line in target reflector plane coordinates from initial position to target position.

Abstract: A method and apparatus hermetically sealing a fiber array block is described. In one embodiment, a fiber array plate is fabricated and an array of tapered holes formed therein. An adhering metal layer, such as a titanium, nickel and gold multilayer, is deposited upon the fiber array plate. A solder preform is positioned on the fiber array plate so that the array of holes in the solder preform corresponds to the array of holes in the array plate. Fibers having an adhering metal layer deposited thereon, are then inserted through the fiber array plate. The tapered holes make the fiber insertion process easier. The fiber array plate is then heated such that the solder preform melts causing the solder to fill any gaps between the fiber array plates and the fiber. When the solder cools a hermetic seal is formed while the fibers remain accurately positioned.

Abstract: An optical cross-connect with integrated optical signal tap is disclosed. In one embodiment, the switch includes two or more optical fiber input ports, lenses to produce collimated beams, one or more optical taps to couple a portion of the optical power from one or more input ports to one or more sample ports, movable mirrors to connect any input port with any output port, two or more optical fiber output ports, and lens to couple collimated beams into the output ports.

Abstract: An optical switch having switch mirror arrays controlled by scanning beams that reduce the amount of electrical connections required and reduce the complexity for constructing large optical switches. Movement of the switch mirror arrays is controlled by one or more scanning beams. The optical switch includes one or more arrays of optical switch inputs and outputs and one or more arrays of movable mirrors to direct light beams from the optical switch inputs to the optical switch outputs. The optical switch also includes one or more control elements to control the movable mirrors based on scanning beams directed to the one or more control elements.

Abstract: An improved photonic switch having optical amplification is described. Signals are amplified before they are switched, after they are switched, or both before and after they are switched. The optical amplification compensates for fixed losses within the switch and transmission system, or provides output power equalization. The photonic switching system includes a demultiplexer for dividing incoming light into different wavelengths or wavebands. The different signals are then supplied to optical amplifiers. The amplifiers amplify the optical signals before supplying them to the optical switch core. Once in the optical switch core, the signals are switched as desired to specified output nodes, then multiplexed back together to provide an output signal from the photonic switching system. In some systems amplification is further provided on the output side.

Abstract: A micro-electro-mechanical-system (MEMS) mirror device includes a mirror component that is capable of moving upon electrostatic actuation. The MEMS mirror device also includes and one or more electrostatic actuators providing electrostatic actuation. The electrostatic actuators having plates disposed approximately perpendicular to the mirror component. The plates are disposed to define a gap between the plates that decreases along a direction perpendicular to a surface of the mirror component.

Abstract: A micromachined apparatus for reflecting light is described that is designed to reduce losses in quality or intensity of light. Mirrors are used having lengths that are longer than their widths to reduce clipping of light when a mirror is located at an angle with respect to light falling thereon. Relatively long mirror torsion components are used to reduce forces required to pivot the mirrors. Regardless of the dimensions of the mirrors and the use of long torsion components, the mirrors are still located relatively close to one another. The relatively close positioning of the mirrors is due to a combined use of notches formed in support frames to which the torsion components are secured, oval shapes of the mirrors which take up less space than rectangular shapes, matching oval openings in the support frames, and the arrangement of the support frames in a non-rectangular array wherein tips of the support frames are located between one another.

Abstract: A method for positioning a movable reflector in an optical switch. A set of optical power values are generated by measuring optical power related to optical reflections from the movable reflection for a plurality of positions of the movable reflector. A processor is used to generate a mathematical approximation of a relationship of optical power versus reflector position based on the set of optical power values. A position of the movable reflector is chosen based on a point in the mathematical approximation of the relationship of optical power versus reflector position.

Abstract: An all-optical switch includes an array of input optical fibers and an array of output optical fibers. A rhomboidal prism beam splitter is positioned in operative relationship with the array of input fibers such that when an array of optical beams is propagated from the array of input optical fibers, the beam splitter splits the array of optical beams into a signal path and a tap path. The rhomboidal prism beam splitter includes a partial internal reflection (PIR) surface and a total internal reflection (TIR) surface. The PIR surface and the TIR surface cooperate to split the array of optical beams into the signal path and the tap path such that the signal path is substantially parallel to the tap path upon exiting the beam splitter.

Abstract: A micromachined apparatus for reflecting light is described that is designed to reduce losses in quality or intensity of light. Mirrors are used having lengths that are longer than their widths to reduce clipping of light when a mirror is located at an angle with respect to light falling thereon. Relatively long mirror torsion components are used to reduce forces required to pivot the mirrors. Regardless of the dimensions of the mirrors and the use of long torsion components, the mirrors are still located relatively close to one another. The relatively close positioning of the mirrors is due to a combined use of notches formed in support frames to which the torsion components are secured, oval shapes of the mirrors which take up less space than rectangular shapes, matching oval openings in the support frames, and the arrangement of the support frames in a non-rectangular array wherein tips of the support frames are located between one another.

Abstract: A method for ensuring path integrity in an optical switch is provided that essentially eliminates any occurrences of misconnected paths and enables new signal paths to be easily generated and existing paths to be switched. The method is suitable for use in optical switching devices that enable selective connection of optical signals received on a plurality of input fibers to respective output fibers, wherein the optical switching device includes a first array of mirrors disposed in a first mirror plane and a second array of mirrors disposed in a second mirror plane. In accordance with the method, all mirrors are maintained in signal paths so that undesired light is prevented from reaching any of the output fibers.

Abstract: An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray.

Abstract: A micromachined apparatus for reflecting light is described that is designed to reduce losses in quality or intensity of light. Mirrors are used having lengths that are longer than their widths to reduce clipping of light when a mirror is located at an angle with respect to light falling thereon. Relatively long mirror torsion components are used to reduce forces required to pivot the mirrors. Regardless of the dimensions of the mirrors and the use of long torsion components, the mirrors are still located relatively close to one another. The relatively close positioning of the mirrors is due to a combined use of notches formed in support frames to which the torsion components are secured, oval shapes of the mirrors which take up less space than rectangular shapes, matching oval openings in the support frames, and the arrangement of the support frames in a non-rectangular array wherein tips of the support frames are located between one another.

Abstract: A micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same allow for a large range of angular motion for a center mirror component. The large range of angular motion for a center mirror component is dictated simply by a thickness of a substrate used or a thickness of a thick film used in making a support structure to support the center mirror component. The MEMS mirror device and methods for fabricating the same allow a large number mirror devices to be fabricated on a substrate. The MEMS mirror device includes a substrate. Electrodes are formed supported by the substrate. A support structure is formed adjacent to the electrodes. A hinge pattern and a mirror pattern having a center mirror component are formed such that the support structure supports the hinge pattern and mirror pattern.

Abstract: An optical switch is described having mirrors that are located over an area having an approximate oval shape. Each mirror is pivotable about a first axis and about a second axis transverse to the first axis. Because of the construction and assembly of each mirror, pivoting about the first axis is more limited than pivoting about the second axis. The area over which the mirrors are located is designed to accommodate pivoting about the first axis and about the second axis such that the area has a length and a width wherein the length is much more than the width. In addition, pivoting about the first axis limits pivoting about the second axis and pivoting about the second axis limits pivoting about the first axis. Because pivoting about one axis limits pivoting about another axis, the area over which the mirrors are located has an oval shape as opposed to a rectangular shape.

Abstract: A method for fabricating semiconductor wafers as multiple-depth structure (i.e., having portions of varying height). The method includes patterning a first substrate and bonding a second substrate to the first. This process creates a subsurface patterned layer. Portions of the second substrate may then be etched, exposing the subsurface patterned layer for selective processing. For example, the layered structure may then be repeatedly etched to produce a multiple depth structure. Or, for example, exposed portions of the first substrate may have material added to them to create multiple-depth structures. This method of fabrication provides substantial advantages over previous methods.

Abstract: A micro-electro-mechanical-system (MEMS) mirror device passive alignment fabrication method is disclosed. In one embodiment, the method includes forming a release layer on a first substrate, forming a mirror pattern having a center mirror component and a hinge pattern supported by the release layer, forming a first passive alignment mechanism on the first substrate, forming an electrode layer on a second substrate, forming a second passive alignment mechanism on the second substrate, aligning the first and second substrates using the first and second passive alignment mechanisms, and attaching the first substrate with the second substrate by inserting a passive non-thermal bonding mechanism through the first and second passive alignment mechanisms.