Abstract: Disclosed are methods and devices relating to microelectromechanical systems (MEMS). A method for fabricating a mechanical beam in a microelectromechanical (MEM) device may comprise depositing a masking layer on a first side of a substrate; etching a first notch on the first side of the substrate; forming a beam structure on the substrate, wherein a first portion of the beam structure is coupled to the first notch; etching a second notch at a second portion of the beam structure; depositing an oxide layer on the beam structure, the masking layer, and the substrate; etching a horizontal surface of the oxide layer at the masking layer and the substrate; and releasing the mechanical beam from the substrate, wherein the mechanical beam comprises the beam structure, the oxide layer, and the masking layer.

Abstract: A microelectromechanical (MEM) device may comprise a first stage comprising a first stage reflective surface; a first frame pivotally coupled to the first stage; a second frame coupled to the first frame; and one or more of: second frame flexures positioned on the first frame and the second frame, or first stage flexures positioned on the first stage; and a tensioning structure. The tensioning structure may be coupled to the first frame to facilitate an amount of tension in one or more of the second frame flexures or the first stage flexures to prevent buckling of the one or more of the second frame flexures or the first stage flexures.

Abstract: A MEM array may comprise a first stage comprising a first stage reflective surface, and a second stage comprising a second stage reflective surface. The MEM array may comprise a base wafer positioned below the first stage and the second stage; and a first frame pivotally coupled to the first stage. The first frame may be pivotally coupled to a second frame, which may comprise a second frame high aspect ratio (AR) member that may be operable to reduce mechanical motion of the second stage.

Abstract: A passive motion isolation system for motion-sensitive equipment is disclosed. The passive motion isolation system has a three-axis free motion platform mounted on a base subject to ambient motions. A vibration isolation subsystem is coupled between the motion-sensitive equipment and the three-axis free motion platform.

Abstract: A passive motion isolation system for motion-sensitive equipment is disclosed. The passive motion isolation system has a three-axis free motion platform mounted on a base subject to ambient motions. A vibration isolation subsystem is coupled between the motion-sensitive equipment and the three-axis free motion platform.

Abstract: A mirror array includes a lid, a base, and a movable mirror between the lid and the base. The movable mirror includes a stationary frame including a cavity, a movable frame in the cavity, and a central stage in the cavity. The mirror array also includes a first protrusion on the base wafer. The first protrusion overlaps with the central stage in a first direction.

Abstract: Methods, apparatuses, and methods of manufacture are described that provide one or more fixed blades mounted to a frame or substrate, one or more movable blades mounted to each structure to be moved, and flexures on which the structures are suspended which reduces moment of inertia during use.

Abstract: Methods, apparatuses and methods of manufacture are described for a MEMS mirror array with reduced crosstalk. The MEMS mirror array has a plurality of reflective surfaces wherein each reflective surface has a resonant frequency, and further wherein adjacent reflective surfaces do not have the same resonant frequency.

Abstract: Reconfigurable computing clusters, compute nodes within reconfigurable computing clusters, and methods of operating a reconfigurable computing cluster are disclosed. A reconfigurable computing cluster includes an optical circuit switch, and a plurality of computing assets, each of the plurality of computing assets connected to the optical circuit switch by two or more bidirectional fiber optic communications paths.

Abstract: A passive motion isolation system for motion-sensitive equipment is disclosed. The passive motion isolation system has a three-axis free motion platform mounted on a base subject to ambient motions. A vibration isolation subsystem is coupled between the motion-sensitive equipment and the three-axis free motion platform.

Abstract: Reconfigurable computing clusters, compute nodes within reconfigurable computing clusters, and methods of operating a reconfigurable computing cluster are disclosed. A reconfigurable computing cluster includes an optical circuit switch, and a plurality of computing assets, each of the plurality of computing assets connected to the optical circuit switch by two or more bidirectional fiber optic communications paths.

Abstract: Reconfigurable computing clusters, compute nodes within reconfigurable computing clusters, and methods of operating a reconfigurable computing cluster are disclosed. A reconfigurable computing cluster includes an optical circuit switch, and a plurality of computing assets, each of the plurality of computing assets connected to the optical circuit switch by two or more bidirectional fiber optic communications paths.

Abstract: Reconfigurable computing clusters, compute nodes within reconfigurable computing clusters, and methods of operating a reconfigurable computing cluster are disclosed. A reconfigurable computing cluster includes an optical circuit switch, and a plurality of computing assets, each of the plurality of computing assets connected to the optical circuit switch by two or more bidirectional fiber optic communications paths.

Abstract: Network switches and methods are disclosed. A network switch may include multiple input ports and multiple output ports, a switch fabric, and switch controller. The controller may receive and store data identifying a plurality of users and data defining which input ports and which output ports each user has authority over. The controller may receive, from a requesting user from the plurality of users, a request to make a connection between a selected input port and a selected output port. The controller may determine, based on the stored data, if the requesting user has authority over both the selected input port and the selected output port. The controller may refuse to make the requested connection if the requesting user does not have authority over both the selected input port and the selected output port.

Abstract: Optical scanning systems and methods of controlling a resonant scanning mirror are disclosed. A rotatable mirror may oscillate about a rotation axis in response to a drive signal. A reference source may provide a reference light beam directed to the rotatable mirror. A reference detector may be disposed to receive the reference light beam reflected from the rotatable mirror twice during each oscillation of the rotatable mirror. A controller may set both an amplitude and a frequency of the drive signal based on an output of the reference detector.

Abstract: An optical circuit switch, method, and apparatus are disclosed. The optical circuit switch may include a plurality of mirror elements, each mirror element uniquely associated with a port from a plurality of ports, each mirror element coupled to a dedicated electrode and configured to rotate in response to a voltage applied to the dedicated electrode. A command interpreter may receive a command defining a plurality of port-pairs to be connected via the optical circuit switch and determine a respective target voltage value to be applied to the dedicated electrode coupled to each of the mirror elements associated with each of the port-pairs. A transition manager may cause voltages applied to the dedicated electrodes coupled to the mirror elements associated with the port-pairs to concurrently transition from respective previous voltage values to the respective target voltage values.

Abstract: Optical circuit switches and switching methods are described. An optical circulator may form a first plurality of bidirectional optical beams from a first plurality of input optical beams and a corresponding first plurality of output optical beams. Each bidirectional optical beam may consist of the corresponding input optical beam and the corresponding output optical beam overlaid to follow, in opposing directions, a common optical path. A mirror array may be disposed to reflect the first plurality of bidirectional optical beams. A reflector may be disposed to intercept bidirectional optical beams reflected from the mirror array and to reflect at least some of the intercepted bidirectional optical beams back to the mirror array.

Abstract: An optical circuit switch and method. A first mirror element rotates about orthogonal axes in response to first and second voltages applied respectively to first and second electrodes. A second mirror element rotates about orthogonal axes in response to third and fourth voltages applied respectively to the third and fourth electrodes. A controller may apply first through fourth voltages respectively to the first through fourth electrodes to make a connection between first and second ports. When an initial insertion loss of the connection does not exceed a predetermined threshold, the controller may conduct independent single-dimension searches to determine values for the first through fourth voltages that minimize the insertion loss. When the initial insertion loss exceeds the predetermined threshold, the controller may conduct a four-dimensional search to determine values for the first through fourth voltages that reduce the insertion loss to not exceed the predetermined threshold.

Abstract: A compound optical circuit switches and methods are disclosed. Two or more 1st-tier switches may be coupled to one or more 2nd-tier switches. Each of a plurality of input ports may be connected to a respective input of one of the 1st-tier switches and each of a plurality of output ports may be connected to a respective output of one of the 1st-tier switches. Each connection between an input port and an output port connected to the same 1st-tier switch may be made within the 1st-tier switch. Each connection between an input port and an output port connected to two different 1st-tier switches is made along a respective connection path through the 1st-tier switch connected to the input port, through a selected 2nd-tier switch, and through the 1st-tier switch connect to the output port.

Abstract: Methods of operating an optical circuit switch and optical circuit switches are disclosed. A command to make an optical connection between a first port and a second port may be received. A determination whether or not input signal light is present at the first port may be made. When light is present at the first port, an optical connection may be made between the first port and the second port. When light is not present at the first port, the optical circuit switch may wait until light is present at the first port before making the connection.