Abstract: A semiconductor boat or carrier fabricated of stress relieved quartz bar having a rectangular cross section. The carrier has parallel elongate side bars and a parallel elongate lower bar, all of which are joined at the ends thereof by transverse lengths of quartz bar also having rectangular cross section. Spaced slots are formed in the inwardly facing edges of the elongate side and bottom bars so that groups of three slots, one in each bar, lie in parallel planes for receiving semiconductor wafers in three point contact in the carrier. End bars attached to and extending between the side bars and central bars extending between each of the side bars and the bottom bar are provided for obtaining rigidity in the carrier. These end and central bars are also rectangular in cross section.