Patents Assigned to CALIFORNIA SCIENTIFIC, INC.
  • Lateral wafer oxidation system with in-situ visual monitoring and method therefor
    Patent number: 9558932
    Abstract: Wafer oxidation apparatus for selective oxidation of a semiconductor workpiece has an oxidation chamber. The oxidation chamber is heated by external infrared heating lamps. A chuck assembly is disposed within the oxidation chamber and configured to be approximately thermally isolated from the oxidation chamber. Carrier gas pathways deliver heated carrier gasses to the oxidation chamber at variable rates for oxidation uniformity.
    Type: Grant
    Filed: April 14, 2015
    Date of Patent: January 31, 2017
    Assignee: CALIFORNIA SCIENTIFIC, INC.
    Inventor: Majid Riaziat