Patents Assigned to Candlescent Technologies Corporation
  • Patent number: 6095883
    Abstract: A method for uniformly depositing of polymer particles onto the surface of a gate metal during the formation of a gate electrode. In one embodiment, the present invention comprises immersing a substrate having a layer of a gate metal disposed over the surface thereof in a fluid bath containing polymer particles. In this embodiment, the fluid bath is contained within a fluid bath tank. Additionally, in the present embodiment, the layer of the gate metal disposed over the substrate has a thickness approximately the same as a desired thickness of the gate electrode to be formed. Next, the present embodiment applies a uniform potential across the surface of the layer of gate metal such that the polymer particles are uniformly deposited onto the layer of the gate metal. In so doing, the present embodiment uniformly deposits the polymer particles onto the layer of the gate metal.
    Type: Grant
    Filed: November 3, 1997
    Date of Patent: August 1, 2000
    Assignee: Candlescent Technologies Corporation
    Inventors: Philip J. Elizondo, Kishore K. Chakravorty, David Caudillo