Patents Assigned to Canon Semiconductor Equipment, Inc.
  • Patent number: 11598565
    Abstract: A cooling apparatus includes a compressor, a first flow path and a second flow path branched from a branch point, a condenser disposed downstream of the branch point in the first flow path, a first decompressor disposed downstream of the condenser, a plurality of evaporators disposed downstream of the first decompressor and connected in series, a second decompressor disposed downstream of the branch point in the second flow path, a detection unit, and a control unit. The second flow path includes a hot-gas flow path configured to connect an outlet of the second decompressor and a meeting point with the first flow path. The control unit controls a degree of opening of the second decompressor depending on the temperature detected by the first temperature-detection unit and controls a degree of opening of the first decompressor depending on the temperature and/or the pressure detected by the detection unit.
    Type: Grant
    Filed: November 24, 2020
    Date of Patent: March 7, 2023
    Assignee: CANON SEMICONDUCTOR EQUIPMENT INC.
    Inventors: Hitoshi Ishihama, Masakazu Nagata, Yuusuke Suzuki
  • Publication number: 20100061891
    Abstract: A flow analysis system or flow injection analysis system, providing a high detection sensitivity even when metallic elements contained in a sample are of extreme trace in amount, wherein a sealed vessel in which a reagent solution is encapsulated is composed of a material having an oxygen permeability of 10 fmol/m2.s.Pa (2 cc/m2.d.atm) or less.
    Type: Application
    Filed: July 20, 2009
    Publication date: March 11, 2010
    Applicant: CANON SEMICONDUCTOR EQUIPMENT INC.
    Inventors: Tadashi Saito, Masayuki Suzuki, Sayoko Haji
  • Patent number: 7631544
    Abstract: A flow analysis flow analysis system having a deaerator for removing gas bubbles in a liquid upstream an analysis section. The deaerator comprises a liquid-containing means variable in internal volume for containing the liquid together with gas bubbles included in the liquid; a liquid-introducing means for introducing the liquid into the liquid-containing means; a gas bubble-discharging means for discharging gas bubbles in the liquid-containing means by decreasing the internal volume of the liquid-containing means while maintaining in the liquid-containing means at least part of the liquid introduced by the liquid-introducing means; and a liquid delivery means for delivering to the analysis section the liquid in the liquid-containing means from which gas bubbles have been discharged by the gas bubble-discharging means.
    Type: Grant
    Filed: August 24, 2006
    Date of Patent: December 15, 2009
    Assignee: Canon Semiconductor Equipment, Inc.
    Inventors: Masao Miyamoto, Masayuki Suzuki