Patents Assigned to Carl Zeiss Microscopy, LLC
  • Patent number: 10410828
    Abstract: Disclosed is a charged particle beam system comprising a charged particle beam column having a charged particle source forming a charged particle beam, an objective lens and a first deflection system for changing a position of impingement of the charged particle beam in a sample plane. The system further comprises a sample chamber comprising a sample stage for holding a sample to be processed, and a controller configured to create and store a height map of a sample surface. The controller is further configured to dynamically adjust the objective lens of the charged particle beam in dependence on a position of impingement of the charged particle beam according to the height map.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: September 10, 2019
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Chuong Huynh, Bernhard Goetze, John A. Notte, IV, Diane Stewart
  • Patent number: 10354830
    Abstract: An ion source includes an external housing, an electrically conductive tip, a gas supply system, configured to supply an operating gas into the neighborhood of the tip, and a cooling system configured to cool the tip. The gas supply system includes a first tube with a hollow interior, and a chemical getter material is provided in the hollow interior of the tube.
    Type: Grant
    Filed: March 27, 2017
    Date of Patent: July 16, 2019
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Weijie Huang, John A. Notte
  • Patent number: 10037862
    Abstract: A charged particle detecting device includes: a holding structure; a first charged particle detector at the terminal portion of the holding structure; a second charged particle detector at the terminal portion of the holding structure; a detector head at the terminal portion of the holding structure; and a first electrode which is transmissive for the first and second species of charged particles covering an entrance opening of the detector head.
    Type: Grant
    Filed: May 24, 2016
    Date of Patent: July 31, 2018
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Sybren J. Sijbrandij, John A. Notte, IV, Raymond Hill
  • Patent number: 9640364
    Abstract: The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10?5 per incident neon ion.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: May 2, 2017
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, FHM-Faridur Rahman, Weijie Huang, Shawn McVey
  • Patent number: 9627172
    Abstract: The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.
    Type: Grant
    Filed: December 15, 2015
    Date of Patent: April 18, 2017
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, Weijie Huang, FHM-Faridur Rahman, Shawn McVey
  • Patent number: 9536699
    Abstract: The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.
    Type: Grant
    Filed: June 25, 2014
    Date of Patent: January 3, 2017
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, Weijie Huang, Raymond Hill, FHM-Faridur Rahman, Alexander Groholski, Shawn McVey
  • Patent number: 9530611
    Abstract: The present disclosure relates to a charged particle beam system, comprising a noble gas field ion beam source, a charged particle beam column, and a housing defining a first vacuum region and a second vacuum region. A noble gas field ion beam source is arranged within the first vacuum region. A first mechanical vacuum pump is functionally attached to the first vacuum region, an ion getter pump is attached to the charged particle beam column, and a gas supply is attached to the first vacuum region configured to supply a noble gas to the noble gas field ion beam source.
    Type: Grant
    Filed: June 25, 2014
    Date of Patent: December 27, 2016
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, Alexander Groholski, Robert Conners, Mark D. DiManna, Raymond Hill
  • Patent number: 9530612
    Abstract: The present disclosure relates to a charged particle beam system comprising a charged particle beam source, a charged particle column, a sample chamber, a plurality of electrically powered devices arranged within or at either one of the charged particle column, the charged particle beam source and the sample chamber, and at least one first converter to convert an electrical AC voltage power into an electrical DC voltage. The first converter is positioned at a distance from either of the charged particle beam source, the charged particle column and the charged particle chamber, and all elements of the plurality of electrically powered devices, when operated during operation of the charged particle beam source, are configured to be exclusively powered by the DC voltage provided by the converter.
    Type: Grant
    Filed: June 25, 2014
    Date of Patent: December 27, 2016
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, Mark D. DiManna, Raymond Hill, Robert Conners, Alexander Groholski
  • Patent number: 9236225
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: April 13, 2015
    Date of Patent: January 12, 2016
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
  • Patent number: 9218935
    Abstract: The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10?5 per incident neon ion.
    Type: Grant
    Filed: June 25, 2014
    Date of Patent: December 22, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, FHM-Faridur Rahman, Weijie Huang, Shawn McVey
  • Patent number: 9218934
    Abstract: The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.
    Type: Grant
    Filed: June 25, 2014
    Date of Patent: December 22, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John A. Notte, IV, Weijie Huang, FHM-Faridur Rahman, Shawn McVey
  • Patent number: 9159527
    Abstract: In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.
    Type: Grant
    Filed: April 10, 2008
    Date of Patent: October 13, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Billy W. Ward, Lou Farkas, John A. Notte, Randall Percival
  • Patent number: 9123502
    Abstract: In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.
    Type: Grant
    Filed: September 20, 2011
    Date of Patent: September 1, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventor: Billy W. Ward
  • Patent number: 9029765
    Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
    Type: Grant
    Filed: May 13, 2013
    Date of Patent: May 12, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Richard Comunale, Alexander Groholski, John A. Notte, IV, Randall G. Percival, Billy W. Ward
  • Patent number: 9012867
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Grant
    Filed: May 23, 2014
    Date of Patent: April 21, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
  • Patent number: 9000396
    Abstract: Disclosed are devices, systems, and methods are disclosed that include: (a) a first material layer positioned on a first surface of a support structure and configured to generate secondary electrons in response to incident charged particles that strike the first layer, the first layer including an aperture configured to permit a portion of the incident charged particles to pass through the aperture; and (b) a second material layer positioned on a second surface of the support structure and separated from the first layer by a distance of 0.5 cm or more, the second layer being configured to generate secondary electrons in response to charged particles that pass through the aperture and strike the second layer, where the device is a charged particle detector.
    Type: Grant
    Filed: October 20, 2011
    Date of Patent: April 7, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Raymond Hill, Shawn McVey, John Notte, IV
  • Patent number: 8993981
    Abstract: Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.
    Type: Grant
    Filed: October 20, 2011
    Date of Patent: March 31, 2015
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: John Notte, IV, Randall G. Percival, Milton Rahman, Louise Barriss, Russell Mello, Mark D. DiManna
  • Patent number: 8907277
    Abstract: Methods disclosed herein include: (a) forming a channel in a sample, the channel extending one micron or more along a direction oriented at an angle to a surface of the sample; (b) exposing a portion of the sample above the channel to a particle beam to cause particles to leave the surface of the sample; and (c) forming an image of the sample based on particles that leave the surface.
    Type: Grant
    Filed: February 13, 2009
    Date of Patent: December 9, 2014
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Rainer Knippelmeyer, Nicholas Economou, Mohan Ananth, Lewis A. Stern, Bill DiNatale, Lawrence Scipioni, John A. Notte, IV
  • Publication number: 20140306121
    Abstract: Ion sources, systems and methods are disclosed.
    Type: Application
    Filed: May 23, 2014
    Publication date: October 16, 2014
    Applicant: Carl Zeiss Microscopy, LLC
    Inventors: Billy W. Ward, John A. Notte, IV, Louis S. Farkas, III, Randall G. Percival, Raymond Hill, Klaus Edinger, Lars Markwort, Dirk Aderhold, Ulrich Mantz
  • Patent number: 8766210
    Abstract: Charged particle system are disclosed and include a first voltage source, a second voltage source electrically isolated from the first voltage source, a charged particle source electrically connected to the first voltage source, and an extractor electrically connected to the second voltage source. Methods relating to the charged particle systems are also disclosed.
    Type: Grant
    Filed: December 16, 2011
    Date of Patent: July 1, 2014
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Raymond Hill, John Notte, IV