Patents Assigned to Carl Zeiss NTS, LLC
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Patent number: 8894796Abstract: In one aspect, methods of nanopore formation in solid state membranes are described herein, In some embodiments, a method of forming an aperture comprises providing at least one solid state membrane in a chamber, selecting a first dose of ions sufficient to provide a first aperture of predetermined diameter through the membrane and exposing a surface of the membrane at a first location to the first dose of ions in a focused ion beam having a focal point of diameter less than or equal to about 1 nm to remove material from the membrane at the first location thereby providing the first aperture having the predetermined diameter or substantially the predetermined diameter.Type: GrantFiled: June 6, 2012Date of Patent: November 25, 2014Assignees: The University of North Carolina at Greensboro, Carl Zeiss NTS, LLCInventors: Adam R Hall, Jijin Yang, David C Ferranti, Colin A Sanford
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Publication number: 20130175444Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods involve relatively light isotopes, minority isotopes or both. In some embodiments, an isotope of Neon is used.Type: ApplicationFiled: March 4, 2013Publication date: July 11, 2013Applicant: Carl Zeiss NTS, LLCInventors: John A. Notte, IV, Sybren Sijbrandij
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Publication number: 20130118184Abstract: Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.Type: ApplicationFiled: June 4, 2012Publication date: May 16, 2013Applicant: CARL ZEISS NTS, LLCInventors: Alexander Groholski, Mark D. DiManna, Brian M. Bassett, Louise Barriss, Colin A. Sanford, John Notte IV
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Patent number: 8399834Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods involve relatively light isotopes, minority isotopes or both. In some embodiments, He-3 is used.Type: GrantFiled: May 26, 2009Date of Patent: March 19, 2013Assignee: Carl Zeiss NTS, LLCInventors: John Notte, IV, Sybren Sijbrandij
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Patent number: 8384029Abstract: A first instrument (230) is used to image a first semiconductor article having a trench (110) of defined cross-section, while a second instrument (220) is used to simultaneously prepare a second semiconductor article with a trench of defined cross-section. Furthermore, a method is disclosed to prepare a trench (110) of defined cross-section in a semiconductor article by rough milling and subsequent fine milling.Type: GrantFiled: June 16, 2009Date of Patent: February 26, 2013Assignee: Carl Zeiss NTS, LLCInventors: Rainer Knippelmeyer, Lawrence Scipioni, Christoph Riedesel, John Morgan, Ulrich Mantz, Ulrich Wagemann
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Patent number: 8334701Abstract: Methods and systems for defect repair are disclosed. The methods include: (a) identifying a defect causing an absence of an electrical connection between a first circuit element and a second circuit element, the first and second circuit elements being positioned in or on a substrate and the defect being positioned in the substrate; (b) removing a portion of the substrate to expose the defect, and depositing a conductive material to electrically connect the first and second circuit elements; and (c) verifying that the defect caused the absence of an electrical connection between the first and second circuit elements.Type: GrantFiled: August 28, 2009Date of Patent: December 18, 2012Assignee: Carl Zeiss NTS, LLCInventors: Rainer Knippelmeyer, Christoph Riedesel, John Morgan, Lawrence Scipioni
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Patent number: 8314403Abstract: Coated tips, as well as related articles, systems and methods are disclosed.Type: GrantFiled: August 26, 2010Date of Patent: November 20, 2012Assignee: Carl Zeiss NTS, LLCInventor: John A. Notte, IV
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Publication number: 20120241640Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like).Type: ApplicationFiled: June 20, 2008Publication date: September 27, 2012Applicant: CARL ZEISS NTS, LLC.Inventors: Billy W. Ward, Colin A. Sanford, John Notte, VI, Alexander Groholski, Mark D. DiManna
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Publication number: 20120199737Abstract: Disclosed are methods for preparing samples that include forming a first channel in a material by directing a first plurality of noble gas ions at the material, forming a second channel in the material by directing a second plurality of noble gas ions at the material, where the second channel is spaced from the first channel so that a portion of the material between channels has a mean thickness of 100 nm or less, and detaching the portion from the material to yield the sample.Type: ApplicationFiled: September 15, 2011Publication date: August 9, 2012Applicant: CARL ZEISS NTS, LLCInventors: Diederik Jan Maas, Maria Rudneva, Emile van Veldhoven, Hendrik Willem Zandbergen
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Patent number: 8227753Abstract: Charged particle beams with different charged particle currents are disclosed. In some embodiments, a method includes exposing a sample to a first ion beam having a first ion current at the sample, and exposing the sample to a second ion beam having a second ion current at the sample, where the first ion current is at least two times greater than the second ion current. In certain embodiments, a method includes creating a first ion beam at a first pressure, exposing a sample to the first ion beam, creating a second ion beam at a second pressure, and exposing the sample to the second ion beam, where the first pressure is at least two times greater than the second pressure.Type: GrantFiled: June 29, 2009Date of Patent: July 24, 2012Assignee: Carl Zeiss NTS, LLCInventors: John A. Notte, IV, Billy W. Ward
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Publication number: 20120145896Abstract: Disclosed are systems and methods for applying a voltage gradient to a gas delivery system, delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1×010?2 Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter and an extractor.Type: ApplicationFiled: October 19, 2011Publication date: June 14, 2012Applicant: Carl Zeiss NTS, LLCInventors: Billy W. Ward, John Notte, IV, Randall G. Percival
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Publication number: 20120138815Abstract: Charged particle system are disclosed and include a first voltage source, a second voltage source electrically isolated from the first voltage source, a charged particle source electrically connected to the first voltage source, and an extractor electrically connected to the second voltage source. Methods relating to the charged particle systems are also disclosed.Type: ApplicationFiled: December 16, 2011Publication date: June 7, 2012Applicant: CARL ZEISS NTS, LLCInventors: Raymond Hill, John Notte, IV
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Publication number: 20120097849Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.Type: ApplicationFiled: December 23, 2011Publication date: April 26, 2012Applicant: CARL ZEISS NTS, LLCInventors: FHM-Faridur Rahman, Louis S. Farkas, III, John A. Notte, IV
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Publication number: 20120085906Abstract: A first instrument (230) is used to image a first semiconductor article having a trench (110) of defined cross-section, while a second instrument (220) is used to simultaneously prepare a second semiconductor article with a trench of defined cross-section. Furthermore, a method is disclosed to prepare a trench (110) of defined cross-section in a semiconductor article by rough milling and subsequent fine milling.Type: ApplicationFiled: June 16, 2009Publication date: April 12, 2012Applicant: CARL ZEISS NTS, LLC.Inventors: Rainer Knippelmeyer, Lawrence Scipioni, Christoph Riedesel, John Morgan, Ulrich Mantz, Ulrich Wagemann
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Publication number: 20120074318Abstract: Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.Type: ApplicationFiled: October 20, 2011Publication date: March 29, 2012Applicant: CARL ZEISS NTS, LLCInventors: John Notte, IV, Randall G. Percival, Milton Rahman, Louise Barriss, Russell Mello, Mark D. DiManna
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Publication number: 20120068067Abstract: The disclosure relates to ion beams systems, such as gas field ion microscopes, having multiple modes of operation, as well as related methods. In some embodiments, the disclosure provides a method of operating a gas field ion microscope system that includes a gas field ion source, where the gas field ion source includes a tip including a plurality of atoms.Type: ApplicationFiled: October 19, 2011Publication date: March 22, 2012Applicant: CARL ZEISS NTS, LLCInventor: Lawrence Scipioni
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Publication number: 20120068068Abstract: Disclosed are devices, systems, and methods are disclosed that include: (a) a first material layer positioned on a first surface of a support structure and configured to generate secondary electrons in response to incident charged particles that strike the first layer, the first layer including an aperture configured to permit a portion of the incident charged particles to pass through the aperture; and (b) a second material layer positioned on a second surface of the support structure and separated from the first layer by a distance of 0.5 cm or more, the second layer being configured to generate secondary electrons in response to charged particles that pass through the aperture and strike the second layer, where the device is a charged particle detector.Type: ApplicationFiled: October 20, 2011Publication date: March 22, 2012Applicant: CARL ZEISS NTS, LLCInventors: Raymond Hill, Shawn McVey, John Notte, IV
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Publication number: 20120057015Abstract: In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.Type: ApplicationFiled: September 20, 2011Publication date: March 8, 2012Applicant: CARL ZEISS NTS, LLCInventor: Billy W. Ward
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Patent number: 8124941Abstract: Disclosed are charged particle systems that include a tip, at least one gas inlet configured to supply gas particles to the tip, and a element having a curved surface positioned to adsorb un-ionized gas particles, and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.Type: GrantFiled: June 29, 2009Date of Patent: February 28, 2012Assignee: Carl Zeiss NTS, LLCInventors: John A. Notte, IV, Randall Percival, Colin A. Sanford, Alexander Grohloski
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Patent number: 8093563Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.Type: GrantFiled: August 27, 2009Date of Patent: January 10, 2012Assignee: Carl Zeiss NTS, LLCInventors: FHM-Faridur Rahman, Louis S. Farkas, III, John A. Notte, IV