Abstract: A particle beam device includes a particle beam generator, an objective lens, and first and second deflection systems for deflecting the particle beam in an object plane defined by the objective lens. In a first operating mode, the first deflection system generates a first deflection field and the second deflection system generates a second deflection field. In a second operating mode, the first deflection system generates a third deflection field and the second deflection system generates a fourth deflection field.
Type:
Grant
Filed:
November 29, 2011
Date of Patent:
March 26, 2013
Assignees:
Carl Zeiss NTS GmbH, Carl Zeiss NTS Ltd.
Abstract: A particle beam device includes a particle beam generator, an objective lens, and first and second deflection systems for deflecting the particle beam in an object plane defined by the objective lens. In a first operating mode, the first deflection system generates a first deflection field and the second deflection system generates a second deflection field. In a second operating mode, the first deflection system generates a third deflection field and the second deflection system generates a fourth deflection field.
Type:
Application
Filed:
November 29, 2011
Publication date:
June 7, 2012
Applicants:
CARL ZEISS NTS LTD., CARL ZEISS NTS GMBH
Abstract: A method of operating a charged-particle microscope, the method comprising: recording a first image of a first region of an object in a first setting; recording a second image of a second region of the object using the charged-particle microscope in a second setting; reading a third image of a third region using the charged-particle microscope, wherein the first and second regions are contained at least partially within the third region; displaying a representation of the first image at least partly within the displayed third image, wherein the representation of the first image includes a first indicator which is indicative of the first setting; displaying a representation of the second image at least partly within the displayed third image, wherein the representation of the second image includes a second indicator which is indicative of the second setting, and wherein the displayed second indicator is different from the displayed first indicator.
Type:
Application
Filed:
November 2, 2011
Publication date:
May 3, 2012
Applicant:
CARL ZEISS NTS LTD.
Inventors:
Stewart Bean, Roger Rowland, Simon Hees