Patents Assigned to Carl Zeiss X-ray Microscopy, Inc.
  • Patent number: 11972511
    Abstract: Improved (e.g., high-throughput, low-noise, and/or low-artifact) X-ray Microscopy images are achieved using a deep neural network trained via an accessible workflow. The workflow involves selection of a desired improvement factor (x), which is used to automatically partition supplied data into two or more subsets for neural network training. The neural network is trained by generating reconstructed volumes for each of the subsets. The neural network can be trained to take projection images or reconstructed volumes as input and output improved projection images or improved reconstructed volumes as output, respectively. Once trained, the neural network can be applied to the training data and/or subsequent data—optionally collected at a higher throughput—to ultimately achieve improved de-noising and/or other artifact reduction in the reconstructed volume.
    Type: Grant
    Filed: July 9, 2021
    Date of Patent: April 30, 2024
    Assignee: Carl Zeiss X-ray Microscopy, Inc.
    Inventors: Matthew Andrew, Lars Omlor, Andriy Andreyev, Christoph Hilmar Graf Vom Hagen
  • Patent number: 11961694
    Abstract: An x-ray source includes an optical communications link to provide a galvanically isolated communication between a system controller and a gun controller. In specific examples, the link is provided through one or more fibers. In addition, the gun controller is preferably remote programmed by the system controller during startup. This addresses the problem of reprogramming a processor in a hard to access location/environment. A watchdog timer is also useful for the gun digital processor of the gun controller.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: April 16, 2024
    Assignee: Carl Zeiss X-ray Microscopy, Inc.
    Inventor: Claus Flachenecker
  • Patent number: 11935228
    Abstract: A method for acquiring a 3D image of a sample structure includes acquiring a first raw 2D set of 2D images of a sample structure at a limited number of raw sample planes; calculating a 3D image of the sample structure represented by a 3D volumetric image data set; and extracting a measurement parameter from the 3D volumetric image data set. A further number of interleaving 2D image acquisitions are recorded at a further number of interleaved sample planes which do not coincide with previous acquisition sample planes. The steps “calculating,” “extracting” and “assigning” are repeated for the further interleaving 2D set until convergence or a maximum number of 2D image acquisitions is recorded. A projection system used for such method comprises a projection light source, a rotatable sample structure holder and a spatially resolving detector. Such method can also be used to acquire virtual tomographic images of a sample.
    Type: Grant
    Filed: October 26, 2021
    Date of Patent: March 19, 2024
    Assignees: Carl Zeiss SMT GmbH, Carl Zeiss X-ray Microscopy Inc.
    Inventors: Ramani Pichumani, Christoph Hilmar Graf vom Hagen, Jens Timo Neumann, Johannes Ruoff, Thomas Matthew Gregorich
  • Patent number: 11864300
    Abstract: The electron beam is typically dynamically steered after its generation on the path to the target. The steering is performed by one or more source coils. These coils produce the magnetic field outside the vacuum vessel allowing air/water/oil cooling to remove undesired heat. The magnetic field is then picked up inside the vacuum vessel with pole pieces and guided towards the region where the magnetic field is needed to steer the electron beam.
    Type: Grant
    Filed: April 23, 2021
    Date of Patent: January 2, 2024
    Assignee: Carl Zeiss X-ray Microscopy, Inc.
    Inventors: Claus Flachenecker, Thomas A. Case
  • Patent number: 11821860
    Abstract: A collision avoidance system and method for an x-ray CT microscope processes image data of an object at different angles and generates a model of the object. This model is then used to configure the microscope for operation and possibly avoid collisions between the microscope and the object.
    Type: Grant
    Filed: October 14, 2020
    Date of Patent: November 21, 2023
    Assignee: CARL ZEISS X-RAY MICROSCOPY INC.
    Inventors: Lars Omlor, Hauyee Chang
  • Patent number: 11817231
    Abstract: A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane.
    Type: Grant
    Filed: August 16, 2021
    Date of Patent: November 14, 2023
    Assignees: Carl Zeiss SMT GmbH, Carl Zeiss X-ray Microscopy Inc.
    Inventors: Johannes Ruoff, Juan Atkinson Mora, Thomas Anthony Case, Heiko Feldmann, Christoph Hilmar Graf Vom Hagen, Thomas Matthew Gregorich, Gerhard Krampert
  • Patent number: 11816765
    Abstract: A x-ray micro tomography system provides the ability to proscriptively determine regularization parameters for iterative reconstruction of a sample, from projection data of the sample. This allows a less experienced operator to determine the regularization parameters with adequate precision.
    Type: Grant
    Filed: October 4, 2021
    Date of Patent: November 14, 2023
    Assignee: Carl Zeiss X-ray Microscopy, Inc.
    Inventors: Matthew Andrew, William Thompson
  • Patent number: 11769647
    Abstract: During operation of a reflection target x-ray source, heat must be removed from many components. The electron beam must be steered to the target and may interact with structures along this path. There is also heat generated in the target itself. This can be excessive, since only a very small percentage of the electron beam's energy is transformed into x-rays. Finally, the x-rays must exit the vacuum through the window, which can also be heated both by the x-rays, reflected electrons, and radiant heat from the target. A water cooled reflective x-ray source provides for water or other fluid cooling of the centering aperture, x-ray target, and/or exit window.
    Type: Grant
    Filed: November 1, 2021
    Date of Patent: September 26, 2023
    Assignee: Carl Zeiss X-ray Microscopy, Inc.
    Inventors: Claus Flachenecker, Bruce Borchers
  • Publication number: 20230143179
    Abstract: A multi scale material segmentation method is provided that creates markers to identify unique particles, for small and large particles independently, and then separately processes those markers.
    Type: Application
    Filed: October 20, 2022
    Publication date: May 11, 2023
    Applicant: Carl Zeiss X-ray Microscopy, Inc.
    Inventors: Evan Drake, Matthew Andrew
  • Publication number: 20230143112
    Abstract: A mineral characterization method for an x-ray CT system comprises generating one or more volume datasets of a sample and identifying phases in the sample by correcting the datasets based on simulations. This can be employed with a polychromatic x-ray simulation and a highly controlled and well scaled implementation of analytical reconstruction to index materials of known composition to reconstructed grayscale intensities. An example of an application of this technology is in the field of mineral characterization on geoscience samples, where a single sample may consist of many individual mineral phases, of unknown distribution. Also addressed is a workflow for data correction and calibration such that acquisition related uncertainties are minimized and reconstructed intensity robustness maximized. This is achieved when some material of known transmission is in the field of view for every projection to create a reference path.
    Type: Application
    Filed: October 20, 2022
    Publication date: May 11, 2023
    Applicant: Carl Zeiss X-ray Microscopy, Inc.
    Inventor: Matthew Andrew
  • Publication number: 20230146198
    Abstract: An x-ray minerology analysis system includes a sample assembly for an x-ray microscopy system. It comprises an outer tube and a bottom plug sealing an inner bore of the outer tube, wherein the outer tube contains powder to be analysed by the x-ray microscopy system.
    Type: Application
    Filed: October 20, 2022
    Publication date: May 11, 2023
    Applicant: Carl Zeiss X-ray Microscopy, Inc.
    Inventor: Matthew Andrew
  • Patent number: 11645792
    Abstract: An x-ray microscopy method that obtains a classification of different particles by distinguishing between different material phases through a combination of image processing involving morphological edge enhancement and possibly resolved absorption contrast differences between the phases along with optional wavelet filtering.
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: May 9, 2023
    Assignee: Carl Zeiss X-ray Microscopy, Inc.
    Inventors: Matthew Andrew, Lars Omlor, Hrishikesh Bale, Christoph Graf vom Hagen
  • Patent number: 11138767
    Abstract: A x-ray micro tomography system provides the ability to proscriptively determine regularization parameters for iterative reconstruction of a sample, from projection data of the sample. This allows a less experienced operator to determine the regularization parameters with adequate precision.
    Type: Grant
    Filed: March 22, 2019
    Date of Patent: October 5, 2021
    Assignee: Carl Zeiss X-Ray Microscopy, Inc.
    Inventors: Matthew Andrew, William Thompson
  • Patent number: 11085888
    Abstract: X-ray microscopy tomography scanning systems are not constrained by continuous scanning trajectories like in medical scanners. In fact, the source and detector can be held stationary during subsequent image capture producing a discrete sampling pattern. For such systems, a method of producing an optimized, even illumination of the object by choosing source/detector locations on a surface of an imaginary cylinder surrounding the object is disclosed. The locations, in one example, form a regular lattice with even coverage on the surface of that cylinder, rather than at locations along a continuous curve such as a helix. Using this method, the effective pitch may be increased beyond the theoretical limit imposed by helical scanning, allowing a greater range of y-axis coverage for the same number of projection angles, corresponding to an increase in throughput.
    Type: Grant
    Filed: November 18, 2019
    Date of Patent: August 10, 2021
    Assignee: Carl Zeiss X-Ray Microscopy, Inc.
    Inventors: William Thompson, Zhifeng Huang
  • Patent number: 10859515
    Abstract: A spectrum measurement and estimation method for tomographic reconstruction, beam hardening correction, dual-energy CT and system diagnosis, etc., comprises determining the spectra for combinations of source acceleration voltage, pre-filters and/or detectors and after measuring the transmission values of several pre-filters, calculating corrected spectra for the combinations of the source acceleration voltage, pre-filters and/or detectors.
    Type: Grant
    Filed: March 22, 2017
    Date of Patent: December 8, 2020
    Assignee: Carl Zeiss X-ray Microscopy, Inc.
    Inventors: Zhifeng Huang, Thomas A. Case, Lourens B. Steger
  • Patent number: 10514343
    Abstract: X-ray microscopy tomography scanning systems are not constrained by continuous scanning trajectories like in medical scanners. In fact, the source and detector can be held stationary during subsequent image capture producing a discrete sampling pattern. For such systems, a method of producing an optimized, even illumination of the object by choosing source/detector locations on a surface of an imaginary cylinder surrounding the object is disclosed. The locations, in one example, form a regular lattice with even coverage on the surface of that cylinder, rather than at locations along a continuous curve such as a helix. Using this method, the effective pitch may be increased beyond the theoretical limit imposed by helical scanning, allowing a greater range of y-axis coverage for the same number of projection angles, corresponding to an increase in throughput.
    Type: Grant
    Filed: February 26, 2016
    Date of Patent: December 24, 2019
    Assignee: CARL ZEISS X-RAY MICROSCOPY, INC.
    Inventors: William Thompson, Zhifeng Huang
  • Patent number: 10335104
    Abstract: A multi energy, such as dual-energy (“DE”), x-ray imaging system data acquisition and image reconstruction system and method enables optimizing the image contrast of a sample. Using the DE x-ray imaging system and its associated user interface applications, an operator performs a low energy (“LE”) and high energy (“HE”) x-ray scan of the same volume of interest of the sample. The system creates a low-energy reconstructed tomographic volume data set from the set of low-energy projections and a high-energy tomographic volume data set from the set of high-energy projections. This enables the operator to control the image contrast of selected slices, and apply the information associated with optimizing the contrast of the selected slice to all slices in the low-energy and high-energy tomographic data sets. This creates a combined volume data set from the LE and HE volume data sets with optimized image contrast throughout.
    Type: Grant
    Filed: July 22, 2015
    Date of Patent: July 2, 2019
    Assignee: Carl Zeiss X-ray Microscopy, Inc.
    Inventors: Thomas A. Case, Susan Candell, Srivatsan Seshadri, Paul McGuinness
  • Patent number: 10297048
    Abstract: A segmentation-and-spectrum-based metal artifact reduction (MAR) system and method is applied in polychromatic X-ray CT system that uses a priori knowledge of high-Z metals in samples which contribute the primary artifacts at a known x-ray energy spectrum. Using a basis materials decomposition, the method solves the problem of reducing or eliminating metal artifacts associated with beam hardening using only a single scan of the sample performed at selected x-ray energy.
    Type: Grant
    Filed: October 28, 2016
    Date of Patent: May 21, 2019
    Assignee: Carl Zeiss X-Ray Microscopy, Inc.
    Inventors: Zhifeng Huang, Thomas A. Case
  • Patent number: 10169865
    Abstract: An x-ray imaging system data acquisition and image reconstruction system and method are disclosed which enable optimizing the image parameters based on multiple tomographic volumes of the sample that have been captured using an x-ray microscopy system. This enables the operator to control the image contrast, for example, of selected slices, and apply the information associated with optimizing the contrast of the selected slice to all slices in two or more tomographic volume data sets. This creates a combined volume with optimized image contrast throughout. Also, the system enables navigation within the volumes through functional annotation, improvements in volume registration and improvements in noise suppression both within the volumes and within slice histograms of the sample.
    Type: Grant
    Filed: October 17, 2016
    Date of Patent: January 1, 2019
    Assignee: Carl Zeiss X-Ray Microscopy, Inc.
    Inventors: Thomas A. Case, Susan Candell, Srivatsan Seshadri, Naomi Kotwal
  • Patent number: 10107769
    Abstract: A multimodality imaging system and method for mineralogy segmentation is disclosed. Image datasets of the sample are generated for one or more modalities, including x-ray and focused ion beam scanning electron microscope (FIB-SEM) modalities. Mineral maps are then created using Energy Dispersive X-ray spectroscopy (EDX) from at least part of the sample covered by the image datasets. The EDX mineral maps are applied as a mask to the image datasets to identify and label regions of minerals within the sample. Feature vectors are then extracted from the labeled regions via feature generators such as Gabor filters. Finally, machine learning training and classification algorithms such as Random Forest are applied to the extracted feature vectors to construct a segmented image representation of the sample that classifies the minerals within the sample.
    Type: Grant
    Filed: January 11, 2016
    Date of Patent: October 23, 2018
    Assignee: CARL ZEISS X-RAY MICROSCOPY INC.
    Inventors: Sreenivas Naga Bhattiprolu, Tom Waite