Patents Assigned to Carl Zeiss X-ray Microscopy, Inc.
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Patent number: 12213238Abstract: A method for controlling an x-ray source comprises generating an electron beam for striking the target to generate x-rays and steering the electron beam to a desired location on the target using a first and a second steering system distributed along a flight tube. In this way, the beam can be steering to the desired location while also passing through the center of a focusing lens to maintain optimal beam characteristics. Also possible is scanning the electron beam over the target to find a fiducial mark. Then, a desired location can be found as an offset from this mark.Type: GrantFiled: October 18, 2022Date of Patent: January 28, 2025Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventor: Claus Flachenecker
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Patent number: 12148138Abstract: Multivariant feature extraction is used for training volumes or 2D images, (real or synthetic) coupled to process (effective) values probably obtained from direct simulation. These features are coupled with machine learning/regression algorithms to make a predictive model for the effective property. This model can then be used on a real geometry of a sample for effective parameter prediction.Type: GrantFiled: September 26, 2020Date of Patent: November 19, 2024Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventor: Matthew Andrew
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Patent number: 12130392Abstract: A detection system for an x-ray microscopy system utilizes high bandgap, direct conversion x-ray detection materials. The signal of the x-ray projection is recorded in a spatial light modulator such as a liquid crystal (LC) light valve. The light valve is then read-out by a polarized light optical microscope. This configuration will mitigate the loss of light in the optical system over the current scintillator-optical microscope-camera detection systems.Type: GrantFiled: November 5, 2019Date of Patent: October 29, 2024Assignee: Carl Zeiss X-ray Microscopy Inc.Inventors: Xiaochao Xu, Christoph Graf Vom Hagen
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Patent number: 12035451Abstract: An x-ray source has a target assembly including a target, an electron source for generating electrons to impact the target, and a flight tube assembly separating the target assembly from the electron source and transporting a coolant to the target assembly. The flight tube assembly includes a flight tube interface ring, a target cartridge tube, and an electrical isolation ring between the flight tube interface ring and the target cartridge tube.Type: GrantFiled: April 23, 2021Date of Patent: July 9, 2024Assignee: CARL ZEISS X-RAY MICROSCOPY INC.Inventors: Claus Flachenecker, Bruce Borchers, Thomas A. Case
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Patent number: 11972511Abstract: Improved (e.g., high-throughput, low-noise, and/or low-artifact) X-ray Microscopy images are achieved using a deep neural network trained via an accessible workflow. The workflow involves selection of a desired improvement factor (x), which is used to automatically partition supplied data into two or more subsets for neural network training. The neural network is trained by generating reconstructed volumes for each of the subsets. The neural network can be trained to take projection images or reconstructed volumes as input and output improved projection images or improved reconstructed volumes as output, respectively. Once trained, the neural network can be applied to the training data and/or subsequent data—optionally collected at a higher throughput—to ultimately achieve improved de-noising and/or other artifact reduction in the reconstructed volume.Type: GrantFiled: July 9, 2021Date of Patent: April 30, 2024Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventors: Matthew Andrew, Lars Omlor, Andriy Andreyev, Christoph Hilmar Graf Vom Hagen
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Patent number: 11961694Abstract: An x-ray source includes an optical communications link to provide a galvanically isolated communication between a system controller and a gun controller. In specific examples, the link is provided through one or more fibers. In addition, the gun controller is preferably remote programmed by the system controller during startup. This addresses the problem of reprogramming a processor in a hard to access location/environment. A watchdog timer is also useful for the gun digital processor of the gun controller.Type: GrantFiled: April 23, 2021Date of Patent: April 16, 2024Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventor: Claus Flachenecker
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Patent number: 11935228Abstract: A method for acquiring a 3D image of a sample structure includes acquiring a first raw 2D set of 2D images of a sample structure at a limited number of raw sample planes; calculating a 3D image of the sample structure represented by a 3D volumetric image data set; and extracting a measurement parameter from the 3D volumetric image data set. A further number of interleaving 2D image acquisitions are recorded at a further number of interleaved sample planes which do not coincide with previous acquisition sample planes. The steps “calculating,” “extracting” and “assigning” are repeated for the further interleaving 2D set until convergence or a maximum number of 2D image acquisitions is recorded. A projection system used for such method comprises a projection light source, a rotatable sample structure holder and a spatially resolving detector. Such method can also be used to acquire virtual tomographic images of a sample.Type: GrantFiled: October 26, 2021Date of Patent: March 19, 2024Assignees: Carl Zeiss SMT GmbH, Carl Zeiss X-ray Microscopy Inc.Inventors: Ramani Pichumani, Christoph Hilmar Graf vom Hagen, Jens Timo Neumann, Johannes Ruoff, Thomas Matthew Gregorich
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Patent number: 11864300Abstract: The electron beam is typically dynamically steered after its generation on the path to the target. The steering is performed by one or more source coils. These coils produce the magnetic field outside the vacuum vessel allowing air/water/oil cooling to remove undesired heat. The magnetic field is then picked up inside the vacuum vessel with pole pieces and guided towards the region where the magnetic field is needed to steer the electron beam.Type: GrantFiled: April 23, 2021Date of Patent: January 2, 2024Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventors: Claus Flachenecker, Thomas A. Case
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Patent number: 11821860Abstract: A collision avoidance system and method for an x-ray CT microscope processes image data of an object at different angles and generates a model of the object. This model is then used to configure the microscope for operation and possibly avoid collisions between the microscope and the object.Type: GrantFiled: October 14, 2020Date of Patent: November 21, 2023Assignee: CARL ZEISS X-RAY MICROSCOPY INC.Inventors: Lars Omlor, Hauyee Chang
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Patent number: 11817231Abstract: A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane.Type: GrantFiled: August 16, 2021Date of Patent: November 14, 2023Assignees: Carl Zeiss SMT GmbH, Carl Zeiss X-ray Microscopy Inc.Inventors: Johannes Ruoff, Juan Atkinson Mora, Thomas Anthony Case, Heiko Feldmann, Christoph Hilmar Graf Vom Hagen, Thomas Matthew Gregorich, Gerhard Krampert
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Patent number: 11816765Abstract: A x-ray micro tomography system provides the ability to proscriptively determine regularization parameters for iterative reconstruction of a sample, from projection data of the sample. This allows a less experienced operator to determine the regularization parameters with adequate precision.Type: GrantFiled: October 4, 2021Date of Patent: November 14, 2023Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventors: Matthew Andrew, William Thompson
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Patent number: 11769647Abstract: During operation of a reflection target x-ray source, heat must be removed from many components. The electron beam must be steered to the target and may interact with structures along this path. There is also heat generated in the target itself. This can be excessive, since only a very small percentage of the electron beam's energy is transformed into x-rays. Finally, the x-rays must exit the vacuum through the window, which can also be heated both by the x-rays, reflected electrons, and radiant heat from the target. A water cooled reflective x-ray source provides for water or other fluid cooling of the centering aperture, x-ray target, and/or exit window.Type: GrantFiled: November 1, 2021Date of Patent: September 26, 2023Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventors: Claus Flachenecker, Bruce Borchers
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Publication number: 20230146198Abstract: An x-ray minerology analysis system includes a sample assembly for an x-ray microscopy system. It comprises an outer tube and a bottom plug sealing an inner bore of the outer tube, wherein the outer tube contains powder to be analysed by the x-ray microscopy system.Type: ApplicationFiled: October 20, 2022Publication date: May 11, 2023Applicant: Carl Zeiss X-ray Microscopy, Inc.Inventor: Matthew Andrew
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Publication number: 20230143179Abstract: A multi scale material segmentation method is provided that creates markers to identify unique particles, for small and large particles independently, and then separately processes those markers.Type: ApplicationFiled: October 20, 2022Publication date: May 11, 2023Applicant: Carl Zeiss X-ray Microscopy, Inc.Inventors: Evan Drake, Matthew Andrew
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Publication number: 20230143112Abstract: A mineral characterization method for an x-ray CT system comprises generating one or more volume datasets of a sample and identifying phases in the sample by correcting the datasets based on simulations. This can be employed with a polychromatic x-ray simulation and a highly controlled and well scaled implementation of analytical reconstruction to index materials of known composition to reconstructed grayscale intensities. An example of an application of this technology is in the field of mineral characterization on geoscience samples, where a single sample may consist of many individual mineral phases, of unknown distribution. Also addressed is a workflow for data correction and calibration such that acquisition related uncertainties are minimized and reconstructed intensity robustness maximized. This is achieved when some material of known transmission is in the field of view for every projection to create a reference path.Type: ApplicationFiled: October 20, 2022Publication date: May 11, 2023Applicant: Carl Zeiss X-ray Microscopy, Inc.Inventor: Matthew Andrew
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Patent number: 11645792Abstract: An x-ray microscopy method that obtains a classification of different particles by distinguishing between different material phases through a combination of image processing involving morphological edge enhancement and possibly resolved absorption contrast differences between the phases along with optional wavelet filtering.Type: GrantFiled: December 18, 2020Date of Patent: May 9, 2023Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventors: Matthew Andrew, Lars Omlor, Hrishikesh Bale, Christoph Graf vom Hagen
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Patent number: 11138767Abstract: A x-ray micro tomography system provides the ability to proscriptively determine regularization parameters for iterative reconstruction of a sample, from projection data of the sample. This allows a less experienced operator to determine the regularization parameters with adequate precision.Type: GrantFiled: March 22, 2019Date of Patent: October 5, 2021Assignee: Carl Zeiss X-Ray Microscopy, Inc.Inventors: Matthew Andrew, William Thompson
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Patent number: 11085888Abstract: X-ray microscopy tomography scanning systems are not constrained by continuous scanning trajectories like in medical scanners. In fact, the source and detector can be held stationary during subsequent image capture producing a discrete sampling pattern. For such systems, a method of producing an optimized, even illumination of the object by choosing source/detector locations on a surface of an imaginary cylinder surrounding the object is disclosed. The locations, in one example, form a regular lattice with even coverage on the surface of that cylinder, rather than at locations along a continuous curve such as a helix. Using this method, the effective pitch may be increased beyond the theoretical limit imposed by helical scanning, allowing a greater range of y-axis coverage for the same number of projection angles, corresponding to an increase in throughput.Type: GrantFiled: November 18, 2019Date of Patent: August 10, 2021Assignee: Carl Zeiss X-Ray Microscopy, Inc.Inventors: William Thompson, Zhifeng Huang
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Patent number: 10859515Abstract: A spectrum measurement and estimation method for tomographic reconstruction, beam hardening correction, dual-energy CT and system diagnosis, etc., comprises determining the spectra for combinations of source acceleration voltage, pre-filters and/or detectors and after measuring the transmission values of several pre-filters, calculating corrected spectra for the combinations of the source acceleration voltage, pre-filters and/or detectors.Type: GrantFiled: March 22, 2017Date of Patent: December 8, 2020Assignee: Carl Zeiss X-ray Microscopy, Inc.Inventors: Zhifeng Huang, Thomas A. Case, Lourens B. Steger
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Patent number: 10514343Abstract: X-ray microscopy tomography scanning systems are not constrained by continuous scanning trajectories like in medical scanners. In fact, the source and detector can be held stationary during subsequent image capture producing a discrete sampling pattern. For such systems, a method of producing an optimized, even illumination of the object by choosing source/detector locations on a surface of an imaginary cylinder surrounding the object is disclosed. The locations, in one example, form a regular lattice with even coverage on the surface of that cylinder, rather than at locations along a continuous curve such as a helix. Using this method, the effective pitch may be increased beyond the theoretical limit imposed by helical scanning, allowing a greater range of y-axis coverage for the same number of projection angles, corresponding to an increase in throughput.Type: GrantFiled: February 26, 2016Date of Patent: December 24, 2019Assignee: CARL ZEISS X-RAY MICROSCOPY, INC.Inventors: William Thompson, Zhifeng Huang