Abstract: A method, including: recording plural images of an object by scanning plural particle beams across the object and detecting signals generated by the particle beams, wherein the plural particle beams are generated by a multi-beam particle microscope; determining plural regions of interest; determining plural image regions in each of the recorded images; determining plural displacement vectors; and determining image distortions based on image data of the recorded images and the determined displacement vectors.

Abstract: An exemplary surgical device includes a shaft with a lumen defined therethrough and an element movable from a stored position to a deployed position in which a larger portion of the element extends out of the distal end of the lumen; wherein motion from the stored position to the deployed position causes a first leg of the element to advance distally relative to the distal end of the shaft, and causes a second leg of the element to move proximally relative to the distal end of the shaft.

Abstract: Provided for herein are methods for producing reflective optical elements for the EUV wavelength range which have grating structures or which include structures that can serve as phase shifters. The methods may include the following operations: applying a structurable layer to a substrate, applying a reflective coating to the substrate that has been provided with the structurable layer, and locally irradiating the structurable layer. The structurable layer may be irradiated before or after application of the reflective coating.

Abstract: A measurement illumination optical unit guides illumination light into an object field of a projection exposure apparatus for EUV lithography. The illumination optical unit has a field facet mirror with a plurality of field facets and a pupil facet mirror with a plurality of pupil facets. The latter serve for overlaid imaging in the object field of field facet images of the field facets. A field facet imaging channel of the illumination light is guided via any one field facet and any one pupil facet. A field stop specifies a field boundary of an illumination field in the object plane. The illumination field has a greater extent along one field dimension than any one of the field facet images. At least some of the field facets include tilt actuators which help guide the illumination light into the illumination field via various field facets and one and the same pupil facet.

Abstract: A single plane illumination microscope having an illumination optical system for illuminating a sample located on a sample carrier in a medium, and which is parallel to a planar reference surface. The sample is illuminated by a light sheet via an illumination light path. A detection optical system has a detection beam path. The optical axes of the illumination and detection optical systems each define an angle that is not equal to zero degrees along with the normal to the reference surface. A barrier layer system includes at least one layer of a given material having a given thickness and separates the medium from the illumination and detection optical systems. A base area of the barrier layer system is in contact with the region that is accessible for illumination and detection activities, said base area running parallel to the reference surface.

Abstract: A method creates a measurement plan of a dimensional measuring apparatus or controls a measurement of the dimensional measuring apparatus. The method includes receiving setting parameters defining a measurement or control command of multiple measurement or control commands of the dimensional measuring apparatus. The method includes evaluating the setting parameters based on at least one of a statistical evaluation and an evaluation using machine-assisted learning. The method includes determining a presetting that assigns at least one setting parameter of the evaluated setting parameters to the measurement or control command. The method includes outputting a setting parameter proposal based on the determined presetting in response to receiving an input command for selecting the measurement or control command.

Abstract: An object receiving container may receive an object which is examinable, analyzable and/or processable at cryo-temperatures. An object holding system may comprise an object receiving container. A beam apparatus or an apparatus for processing an object may comprise an object receiving container or an object holding system. An object may be examined, analyzed and/or processed using an object receiving container or an object holding system. The object receiving container may comprise a first container unit, a cavity for receiving the object, a second container unit, which is able to be brought into a first position and/or into a second position relative to the first container unit, and at least one fastening device which is arranged at the first container unit or at the second container unit for arranging the object receiving container at a holding device.

Abstract: A gas feed device includes a feed unit that feeds a gaseous state of a first precursor and/or a gaseous state of a second precursor, a first line device that conducts the gaseous state of the first precursor to the feed unit and a second line device that conducts the gaseous state of the second precursor to the feed unit. A first valve is arranged between the first line device and the feed unit. A second valve is arranged between the second line device and the feed unit. A control valve is connected to the first valve and is arranged between the first valve and the feed unit. The control valve is connected to the second valve and is arranged between the second valve and the feed unit. The first valve, the second valve and/or the control valve may be magnetic valve(s).

Abstract: An apparatus, a method, and a computer program for determining a chamfer property of a workpiece chamfer are provided. The method includes generating measurement points along at least a first measuring path, the first measuring path running over a first chamfer edge, determining at least one unadapted compensating element for the measurement points of the first measuring path, and determining a spatial position of the first chamfer edge depending on a deviation between the measurement points of the first measuring path and the at least one unadapted compensating element.

Abstract: Apparatus and method for capturing an image having a detection beam path for guiding detection radiation from a sample to a detector having a plurality of detector elements. The detector has no more than ten and, preferably, four or five detector elements; and an evaluation unit, which is configured to carry out an evaluation in accordance with the Airyscan method on the image data captured by means of the detector and which generates a high-resolution image.

Abstract: A method and an apparatus for isolating a vibration of a positioning device are provided. The apparatus includes a base plate for the positioning device, at least one active bearing element for bearing the base plate on/at a foundation and at least one evaluation and control device. The apparatus includes at least one means for determining a foundation movement-dependent quantity, wherein the active bearing element is controllable by the at least one control and evaluation device on the basis of the foundation movement-dependent quantity.

Abstract: A method can be used for sensing and processing image data for an object to be imaged. The object is scanned incompletely by virtue of regions (eB) of the object being sensed, where the sensed image regions (eB) alternate with non-sensed image regions (neB) of the object. Image data (rBD) of the non-sensed image regions (neB) are reconstructed on the basis of the sensed image data (eBD) of the sensed image regions (eB). A noise signal (N) of the sensed image data (eBD) of the sensed regions (eB) is ascertained and transferred to the reconstructed image data (rBD) of the non-sensed regions (neB), so that a user obtains a homogeneous visual impression in relation to the noise arising in the overall image data of the object visualized in a resultant overall image (rGBInv).

Abstract: An immersion objective includes a correction group or correcting a spherical aberration. The displacement of the correction group along the optical axis leads to a substantially negligible defocus aberration.

Abstract: An arrangement of a microlithographic optical imaging device includes first and supporting structures. The first supporting structure supports an optical element of the imaging device. The first supporting structure supports the second supporting structure via supporting spring devices of a vibration decoupling device. The supporting spring devices act kinematically parallel to one another between the first and second supporting structures. Each supporting spring device defines a supporting force direction and a supporting length along the supporting force direction. The second supporting structure supports a measuring device configured to measure the position and/or orientation of the optical element in relation to a reference in at least one degree of freedom and up to all six degrees of freedom in space. A creep compensation device compensates a change in a static relative situation between the first and second supporting structures in at least one correction degree of freedom.

Abstract: An optical assembly in a laser scanning microscope, having an optical scanning unit providing a first pupil plane, a first beam deflecting device, made of a first scanner arranged on the first pupil plane, for scanning excitation radiation in a first coordinate direction, a first focusing device generating a second pupil plane, optically conjugated to the first pupil plane, and a second beam deflecting device for deflecting the excitation radiation. The second deflecting device is arranged on the second pupil plane. A second focusing device to generate a third pupil plane, is optically conjugated to the first pupil plane and the second pupil plane. A third beam deflecting device is arranged on the third pupil plane, and a variable beam deflecting device is provided to switch an optical beam path between a first beam path and a second beam path.

Abstract: The invention relates to a medical optical system. The medical optical system comprises: —a microendoscope (3) for capturing histological images, each of which displays a microscopic tissue section (16) of a macroscopic tissue region (15) with a tumor (23); and—a classification device (31) for classifying the macroscopic tissue sections (16) displayed in the histological images as at least one respective tissue section that represents the tumor (23) or a tissue section that represents healthy tissue and for outputting a classification result for each classified microscopic tissue section (16). The medical optical system additionally comprises a combination device (37) which generates a macroscopic classification image (43) by combining the classification results, said classification image representing the location of the tumor (23) in the macroscopic tissue region (15).

Abstract: The system described herein relates to a gas feed device having a first precursor reservoir that receives a first precursor and having a second precursor reservoir that receives a second precursor, a feed unit that feeds a gaseous state of the first precursor and/or a gaseous state of the second precursor onto a surface of an object. A first line device is arranged between the first precursor reservoir and the feed unit. A second line device is arranged between the second precursor reservoir and the feed unit. A first valve is arranged between the first line device and the feed unit. A second valve is arranged between the second line device and the feed unit. A control valve for the feed of the gaseous state of the first precursor and/or the gaseous state of the second precursor is connected to the first valve, the second valve and the feed unit.

Abstract: A computer-implemented method for fitting a spectacle lens, which has a first spectacle lens surface, a second spectacle lens surface, and at least one dioptric power to be obtained, to a spectacle frame with a certain frame edge curve is made available. In the method, a free-form surface formed on a first spectacle lens surface is fitted to the frame edge curve of the spectacle frame. The free-form surface is fitted to the frame edge curve by virtue of the free-form surface and the second spectacle lens surface being optimized with regard to minimizing the difference between the free-form surface edge curve and the frame edge curve and with regard to achieving the at least one dioptric power to be obtained with the spectacle lens.

Abstract: Techniques in connection with the use of a multi-pixel polarization filter in the light-microscopic examination of a sample object are described. In this way e.g. a particle analysis can be carried out, e.g. in particular for determining the technical cleanness of a surface of the sample object.

Abstract: A fiber plug facilitates optical coupling of a light-guiding fiber to a plug receptacle and includes a plug housing for receiving and locking parts of the fiber plug in position relative to one another. The plug housing has: a fiber inlet and a fiber bearing for the spatially fixed reception of the fiber; optically downstream of the fiber bearing along a beam path, an optical lens for collecting light exiting at an end face of the light-guiding fiber and for collimating the collected light; and a coupling surface with an output of the beam path and with a coupling structure for connection to a receptacle structure that is complementary to the coupling structure. An adjustable optical element is arranged optically downstream of the fiber bearing in the beam path and has a first component of a magnetic coupling consisting of two components and a first component of a kinematic coupling.