Patents Assigned to Carl Zeizz SMT GmbH
  • Method for calibrating a position-measuring system and position-measuring system
    Patent number: 9528825
    Abstract: A method is provided for calibrating a position-measuring system which includes the following steps: a) multiple measurements of positions of a structure of a sample held by a sample stage at different pressures of the gaseous medium in which the sample stage is arranged, b) ascertaining the pressure dependence when determining actual positions by use of an evaluation unit, c) establishing a calibration rule based on the ascertained pressure dependence, and d) applying the calibration rule when determining the actual positions.
    Type: Grant
    Filed: July 10, 2014
    Date of Patent: December 27, 2016
    Assignee: Carl Zeizz SMT GmbH
    Inventors: Carola Blaesing-Bangert, Alexander Huebel