Abstract: A high-power light system includes a lamp for producing light within a designated wavelength range, a chiller for maintaining the lamp below a defined temperature threshold, and a control module for regulating operation of both the lamp and the chiller. The lamp includes a plurality of light emitting diodes (LEDs) arranged into independently-operable modules. In use, the control module selectively overdrives the LEDs to yield high-power light within the designated wavelength range. To prevent overheating within the lamp, the control module restricts the lamp to a pulse-based operational cycle, whereby each period of LED activation is of limited duration and is immediately followed by a period of deactivation at least three times as long in duration as the period of activation. Additionally, one or more temperature sensors are disposed within the lamp and enable the control module to temporarily suspend LED activation when measured temperature levels exceed the defined threshold.

Abstract: A system for the fabrication of patterned miniature structures, such integrated circuits, includes a continuous, flexible substrate that is transported by rollers to a series of processing stations. To ensure proper alignment amongst the various stations, the substrate is provided with at least one fiducial that is raised above its top surface a height that maximizes optical contrast when viewed interferometrically. At least one processing station includes an optical device that is capable of both interferometrically identifying the fiducial for alignment purposes and subsequently illuminating the substrate with a modifiable light pattern as part of a photolithographic process. Fiducials can also be used to identify gross geometric variances in the substrate caused by external factors, such as heat and moisture. In turn, a web adjustment element can be used to apply selective heat or tension to the substrate in order to correct such geometric variances.

Abstract: A system for maintaining a pollutant controlled workspace includes an airtight enclosure with a front access window. A set of impermeable exterior panels and a set of permeable interior panels are slidably mounted within the access window in a spaced apart relationship. Regulated either through a manual control panel or programmable controller, a fan filter unit treats a supply of source air and delivers the filtered air down into a narrow vertical airflow channel located between the exterior and interior panels. Once a suitable amount of pressure accumulates, the treated air penetrates into the workspace as a horizontal laminar flow. Any particulates present in the workspace are drawn rearward by the laminar flow and are trapped behind a multi-apertured back board. The contaminant air is then drawn from a low pressure return located behind the back board and into the fan filter unit for recirculation within the enclosure.

Abstract: A system for the fabrication of patterned miniature structures, such integrated circuits, includes a continuous, flexible substrate that is transported by rollers to a series of processing stations. To ensure proper alignment amongst the various stations, the substrate is provided with at least one fiducial that is raised above its top surface a height that maximizes optical contrast when viewed interferometrically. At least one processing station includes an optical device that is capable of both interferometrically identifying the fiducial for alignment purposes and subsequently illuminating the substrate with a modifiable light pattern as part of a photolithographic process. Fiducials can also be used to identify gross geometric variances in the substrate caused by external factors, such as heat and moisture. In turn, a web adjustment element can be used to apply selective heat or tension to the substrate in order to correct such geometric variances.

Abstract: A vacuum roller for a web handling system comprises a hollow, cylindrical, rotably driven drum and an end cap threadingly mounted onto the rear end of the drum. Together, the drum and the end cap define a plurality of individual, externally communicable vacuum paths. A spherical, metal movable element is internally disposed within each vacuum path and regulates the passage of air therethrough. A plurality of magnetic elements is fixedly mounted on a stationary annular holder. In use, each magnetic element selectively displaces each movable element when disposed in close proximity thereto to the extent necessary so as to permit the passage of air through its corresponding vacuum path. As such, the vacuum roller is provided with a predefined range of suction, or vacuum zone, about the outer surface of its rotating drum that directly corresponds to the angular arrangement of the plurality of stationary magnetic elements.

Abstract: A fluid bearing assembly well-suited for use as high performance, web handling roller includes a stationary inner component that extends coaxially within a rotatable outer component. The inner component includes a single conical member from which extends a narrow stem. The delivery of fluid into a nominal gap between the inner and outer components creates a tapered bearing, with the outer component capable of frictionless rotation relative to the inner component. A thrust plate is axially mounted onto the stem and is retained thereon by a threaded nut. By delivering fluid into a nominal gap between the thrust plate and the outer component, a thrust bearing is created which counterbalances the net axial force produced from the tapered bearing. Furthermore, precise adjustment of the tapered bearing air gap can be achieved through rotation of the threaded nut, thereby enabling certain performance characteristics of the fluid bearing assembly to be modified.

Abstract: A vacuum roller for a web handling system comprises a hollow, cylindrical, rotably driven drum and an end cap threadingly mounted onto the rear end of the drum. Together, the drum and the end cap define a plurality of individual, externally communicable vacuum paths. A spherical, metal movable element is internally disposed within each vacuum path and regulates the passage of air therethrough. A plurality of magnetic elements is fixedly mounted on a stationary annular holder. In use, each magnetic element selectively displaces each movable element when disposed in close proximity thereto to the extent necessary so as to permit the passage of air through its corresponding vacuum path. As such, the vacuum roller is provided with a predefined range of suction, or vacuum zone, about the outer surface of its rotating drum that directly corresponds to the angular arrangement of the plurality of stationary magnetic elements.

Abstract: A fluid bearing assembly well-suited for use as high performance, web handling roller includes a stationary inner component that extends coaxially within a rotatable outer component. The inner component includes a single conical member from which extends a narrow stem. The delivery of fluid into a nominal gap between the inner and outer components creates a tapered bearing, with the outer component capable of frictionless rotation relative to the inner component. A thrust plate is axially mounted onto the stem and is retained thereon by a threaded nut. By delivering fluid into a nominal gap between the thrust plate and the outer component, a thrust bearing is created which counterbalances the net axial force produced from the tapered bearing. Furthermore, precise adjustment of the tapered bearing air gap can be achieved through rotation of the threaded nut, thereby enabling certain performance characteristics of the fluid bearing assembly to be modified.