Abstract: The invention relates to a high-frequency matching network comprised of a primary switching circuit (1) provided with any type of capacitor (7) and with a variable capacitor (8), and of a high-frequency air-core coil (9). The high frequency matching network is also comprised of a secondary switching circuit (2) provided with any type of capacitor (5, 17), of a high-frequency air-core coil (6) and of at least one excitation electrode (3), whereby the switching circuits (1, 2) are interconnected via the inductive flux of the high-frequency air-core coils (6, 9), and the primary circuit (1) and secondary circuit (2) are additionally coupled in a capacitive manner.

Abstract: A high frequency plasma source includes a support element, on which a magnetic field coil arrangement, a gas distribution system and a unit for extraction of a plasma beam are arranged. Additionally a high frequency matching network is arranged within the plasma source.