Patents Assigned to Celerity, Inc.
  • Publication number: 20080059084
    Abstract: A system and method of characterizing or controlling a flow of a fluid is provided that involves a sensor conduit and a bypass. A plurality of fluids may be utilized in the flow control device based on characteristic information of the device generated during calibration thereof. The characteristic information, in turn is based on a dimensionless parameters, such as adjusted dynamic pressure and adjusted Reynolds number.
    Type: Application
    Filed: September 5, 2007
    Publication date: March 6, 2008
    Applicant: Celerity, Inc.
    Inventors: Chiun Wang, John Lull, William Valentine
  • Patent number: 7334605
    Abstract: A gas panel comprising a first gas stick, a second gas stick, and a first manifold. The first gas stick has a first flow path that includes a first plurality of ports formed in a common plane, and the second gas stick has a second flow path that includes a second plurality of ports formed in the common plane. The first manifold has first and second ports formed in the common plane, the first port being fluidly connected to one port of the first plurality of ports of the first gas stick, and the second port being fluidly connected to one port of the second plurality of ports of the second gas stick. A thermally and vibrationally insulating mounting assembly may be used to mount the first and second gas sticks to a mounting plate.
    Type: Grant
    Filed: August 26, 2003
    Date of Patent: February 26, 2008
    Assignee: Celerity, Inc.
    Inventor: Kim Vu
  • Publication number: 20080041843
    Abstract: A heater that includes a substantially flat layer of electrical resistance material having a first end and a second end, a first electrical conductor electrically connected to the first end of the substantially flat layer of electrical resistance material, a second electrical conductor electrically connected to the second end of the substantially flat layer of electrical resistance material, and an electrically insulating material surrounding the substantially flat layer of electrical resistance material and electrically insulating the first end of the substantially flat layer of electrical resistance material from the second end of the substantially flat layer of electrical resistance material. The heater may be mounted to a surface of a fluid component and used to heat the fluid component, and where the heater includes an aperture that extends through the electrically insulating material, the heater may be placed between a fluid component and a fluid substrate and used to heat both.
    Type: Application
    Filed: October 26, 2007
    Publication date: February 21, 2008
    Applicant: CELERITY, INC.
    Inventors: Michael Bower, Roger Chase
  • Publication number: 20080000283
    Abstract: A method of obtaining at least one representation of a characteristic function of a sensor from a test fluid during calibration of the sensor according to a sensor model having a transfer function operating on flow rate, at least one sensor property and at least one fluid property and employing the at least one representation of the characteristic function to determine flow rates through the sensor during operation with an arbitrary fluid.
    Type: Application
    Filed: September 17, 2007
    Publication date: January 3, 2008
    Applicant: CELERITY, INC.
    Inventors: Chiun Wang, William Valentine, John Lull
  • Publication number: 20070288180
    Abstract: Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
    Type: Application
    Filed: August 22, 2007
    Publication date: December 13, 2007
    Applicant: CELERITY, INC.
    Inventors: JOHN LULL, CHIUN WANG, JOSEPH SAGGIO
  • Patent number: 7307247
    Abstract: A heater that includes a substantially flat layer of electrical resistance material having a first end and a second end, a first electrical conductor electrically connected to the first end of the substantially flat layer of electrical resistance material, a second electrical conductor electrically connected to the second end of the substantially flat layer of electrical resistance material, and an electrically insulating material surrounding the substantially flat layer of electrical resistance material and electrically insulating the first end of the substantially flat layer of electrical resistance material from the second end of the substantially flat layer of electrical resistance material. The heater may be mounted to a surface of a fluid component and used to heat the fluid component, and where the heater includes an aperture that extends through the electrically insulating material, the heater may be placed between a fluid component and a fluid substrate and used to heat both.
    Type: Grant
    Filed: October 13, 2006
    Date of Patent: December 11, 2007
    Assignee: Celerity, Inc.
    Inventors: Michael Joseph Bower, Roger Dean Chase
  • Publication number: 20070260412
    Abstract: Embodiments of the present invention provide systems and methods for attitude insensitive flow devices. One embodiment of the present invention can include a flow device comprising a processor and a computer readable medium accessible by the processor that stores a set of computer instructions executable by the processor. The computer instructions can comprise instructions executable to receive an orientation, receive a sensed flow, and determine a flow through the flow device based on the sense flow and the orientation.
    Type: Application
    Filed: April 19, 2007
    Publication date: November 8, 2007
    Applicant: Celerity, Inc.
    Inventor: Dwight Larson
  • Patent number: 7287434
    Abstract: One embodiment of the present invention can comprise a primary flow measurement system, a secondary flow measurement system in fluid communication with the primary flow measurement system and a control coupled to the primary flow measurement system and the secondary flow measurement system. The controller can comprise a processor and a memory accessible by the processor. The processor can execute computer instructions stored on the memory to calculate a flow rate using the primary flow measurement system, in a first mode of operation, and calculate the flow rate using the secondary flow measurement system, in a second mode of operation. The computer instructions can be further executable to switch between the first mode of operation and the second mode of operation based on a predefined parameter.
    Type: Grant
    Filed: January 27, 2006
    Date of Patent: October 30, 2007
    Assignee: Celerity, Inc.
    Inventors: Stuart A. Tison, Shiliang Lu
  • Patent number: 7273063
    Abstract: Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
    Type: Grant
    Filed: June 8, 2005
    Date of Patent: September 25, 2007
    Assignee: Celerity, Inc.
    Inventors: John Michael Lull, Chiun Wang, Joseph A. Saggio, Jr.
  • Publication number: 20070215206
    Abstract: A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.
    Type: Application
    Filed: May 16, 2007
    Publication date: September 20, 2007
    Applicant: CELERITY, INC.
    Inventors: John Lull, Chiun Wang, William Valentine, Joseph Saggio
  • Patent number: 7272512
    Abstract: A method of obtaining at least one representation of a characteristic function of a sensor from a test fluid during calibration of the sensor according to a sensor model having a transfer function operating on flow rate, at least one sensor property and at least one fluid property and employing the at least one representation of the characteristic function to determine flow rates through the sensor during operation with an arbitrary fluid.
    Type: Grant
    Filed: February 4, 2005
    Date of Patent: September 18, 2007
    Assignee: Celerity, Inc.
    Inventors: Chiun Wang, William S. Valentine, John M. Lull
  • Patent number: 7243035
    Abstract: Systems and methods for correcting measurements of fluid flow using device-specific information to compensate for differences between individual devices of the same design. In one embodiment, a method includes providing device-specific calibration data; sensing a fluid flow; computing a measured fluid flow based on the sensed fluid flow, and correcting the measured fluid flow based on the device-specific calibration data. More particularly, the fluid flow measurement is corrected using correction factors that compensate for the use of a gas that is different from the calibration gas (CF0(1+aF+bF2+cF3)), for device variations in sensor sensitivity (1+??R), and for variations in the split flow of fluid through the flow meter (1???ADC(Sp/100)2). The sensor and split flow correction factors may be used independently of each other in some embodiments.
    Type: Grant
    Filed: May 23, 2003
    Date of Patent: July 10, 2007
    Assignee: Celerity, Inc.
    Inventors: Stuart A. Tison, Shiliang Lu
  • Patent number: 7231931
    Abstract: A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.
    Type: Grant
    Filed: March 28, 2005
    Date of Patent: June 19, 2007
    Assignee: Celerity, Inc.
    Inventors: John M Lull, Chiun Wang, William S Valentine, Joseph A Saggio, Jr.
  • Patent number: 7225835
    Abstract: A gas panel comprising a first gas stick, a second gas stick, and a first manifold. The first gas stick has a first flow path that includes a first plurality of ports formed in a common plane, and the second gas stick has a second flow path that includes a second plurality of ports formed in the common plane. The first manifold has first and second ports formed in the common plane, the first port being fluidly connected to one port of the first plurality of ports of the first gas stick, and the second port being fluidly connected to one port of the second plurality of ports of the second gas stick. A thermally and vibrationally insulating mounting assembly may be used to mount the first and second gas sticks to a mounting plate.
    Type: Grant
    Filed: September 21, 2005
    Date of Patent: June 5, 2007
    Assignee: Celerity, Inc.
    Inventor: Kim Ngoc Vu
  • Patent number: 7222029
    Abstract: Embodiments of the present invention provide systems and methods for attitude insensitive flow devices. One embodiment of the present invention can include a flow device comprising a processor and a computer readable medium accessible by the processor that stores a set of computer instructions executable by the processor. The computer instructions can comprise instructions executable to receive an orientation, receive a sensed flow, and determine a flow through the flow device based on the sense flow and the orientation.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: May 22, 2007
    Assignee: Celerity, Inc.
    Inventor: Dwight S. Larson
  • Patent number: 7216019
    Abstract: Systems and methods for mass flow controllers which minimize false flow conditions and display a reduced sensitivity to pressure transients are disclosed. Pressure gradients that exist within the volume of a mass flow controller fluid path are minimized in order to limit the potential energy contained in compressed or pressurized process gas. Additionally, process gas pressure may be monitored using a pressure sensor. This pressure signal is utilized in conjunction with a control algorithm to cancel the detrimental effect of certain flow components. These mass flow controllers may be used as drop in replacements for legacy mass flow controllers and reduce the cost of gas sticks due to elimination of discrete components such as pressure regulators, gas filters, pressure transducers, local pressure displays, isolation valves, seals, etc.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: May 8, 2007
    Assignee: Celerity, Inc.
    Inventors: Kenneth E. Tinsley, Faisal Tariq
  • Publication number: 20070047933
    Abstract: A heater that includes a substantially flat layer of electrical resistance material having a first end and a second end, a first electrical conductor electrically connected to the first end of the substantially flat layer of electrical resistance material, a second electrical conductor electrically connected to the second end of the substantially flat layer of electrical resistance material, and an electrically insulating material surrounding the substantially flat layer of electrical resistance material and electrically insulating the first end of the substantially flat layer of electrical resistance material from the second end of the substantially flat layer of electrical resistance material. The heater may be mounted to a surface of a fluid component and used to heat the fluid component, and where the heater includes an aperture that extends through the electrically insulating material, the heater may be placed between a fluid component and a fluid substrate and used to heat both.
    Type: Application
    Filed: October 13, 2006
    Publication date: March 1, 2007
    Applicant: Celerity, Inc.
    Inventors: Michael Bower, Roger Chase
  • Publication number: 20070034016
    Abstract: An ultrasonic flow sensor that includes a conduit having a length, a first ultrasonic transducer disposed at a first position along the length of the conduit, a second ultrasonic transducer disposed at a second position along the length of the conduit, the second position being spaced apart from the first position, a first reflecting interface and a second reflecting interface. The first reflecting interface is in registration with the first ultrasonic transducer to receive first acoustic energy from the first ultrasonic transducer and to reflect the first acoustic energy in a direction generally along a length of the conduit and into a fluid within the conduit. The second reflecting interface is in registration with the second ultrasonic transducer to receive second acoustic energy from the second ultrasonic transducer and to reflect the second acoustic energy in a direction generally along the length of the conduit and into the fluid within the conduit.
    Type: Application
    Filed: August 10, 2006
    Publication date: February 15, 2007
    Applicant: Celerity, Inc.
    Inventors: Thomas Maginnis, Kim Vu
  • Patent number: 7150201
    Abstract: One embodiment of the present invention can comprise a primary flow measurement system, a secondary flow measurement system in fluid communication with the primary flow measurement system and a control coupled to the primary flow measurement system and the secondary flow measurement system. The controller can comprise a processor and a memory accessible by the processor. The processor can execute computer instructions stored on the memory to calculate a flow rate using the primary flow measurement system, in a first mode of operation, and calculate the flow rate using the secondary flow measurement system, in a second mode of operation. The computer instructions can be further executable to switch between the first mode of operation and the second mode of operation based on a predefined parameter.
    Type: Grant
    Filed: December 15, 2004
    Date of Patent: December 19, 2006
    Assignee: Celerity, Inc.
    Inventors: Stuart A. Tison, Shiliang Lu
  • Publication number: 20060272703
    Abstract: A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first predetermined portion of the flow of process fluid, and the at least one second fluid outlet provides the remaining portion of the flow of process fluid. In one embodiment, the control system includes a pressure transducer, first and second multipliers, and first and second flow controllers. The first multiplier multiplies a pressure signal received from the pressure transducer by a first setpoint to control a first flow controller that provides the first predetermined portion of the flow of process fluid. The second multiplier multiplies the pressure signal by a second setpoint to control a second flow controller that provides the remaining portion.
    Type: Application
    Filed: August 15, 2006
    Publication date: December 7, 2006
    Applicant: Celerity, Inc.
    Inventors: John Lull, William Valentine