Patents Assigned to Celerity, Inc.
  • Patent number: 7272512
    Abstract: A method of obtaining at least one representation of a characteristic function of a sensor from a test fluid during calibration of the sensor according to a sensor model having a transfer function operating on flow rate, at least one sensor property and at least one fluid property and employing the at least one representation of the characteristic function to determine flow rates through the sensor during operation with an arbitrary fluid.
    Type: Grant
    Filed: February 4, 2005
    Date of Patent: September 18, 2007
    Assignee: Celerity, Inc.
    Inventors: Chiun Wang, William S. Valentine, John M. Lull
  • Patent number: 7243035
    Abstract: Systems and methods for correcting measurements of fluid flow using device-specific information to compensate for differences between individual devices of the same design. In one embodiment, a method includes providing device-specific calibration data; sensing a fluid flow; computing a measured fluid flow based on the sensed fluid flow, and correcting the measured fluid flow based on the device-specific calibration data. More particularly, the fluid flow measurement is corrected using correction factors that compensate for the use of a gas that is different from the calibration gas (CF0(1+aF+bF2+cF3)), for device variations in sensor sensitivity (1+??R), and for variations in the split flow of fluid through the flow meter (1???ADC(Sp/100)2). The sensor and split flow correction factors may be used independently of each other in some embodiments.
    Type: Grant
    Filed: May 23, 2003
    Date of Patent: July 10, 2007
    Assignee: Celerity, Inc.
    Inventors: Stuart A. Tison, Shiliang Lu
  • Patent number: 7231931
    Abstract: A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.
    Type: Grant
    Filed: March 28, 2005
    Date of Patent: June 19, 2007
    Assignee: Celerity, Inc.
    Inventors: John M Lull, Chiun Wang, William S Valentine, Joseph A Saggio, Jr.
  • Patent number: 7225835
    Abstract: A gas panel comprising a first gas stick, a second gas stick, and a first manifold. The first gas stick has a first flow path that includes a first plurality of ports formed in a common plane, and the second gas stick has a second flow path that includes a second plurality of ports formed in the common plane. The first manifold has first and second ports formed in the common plane, the first port being fluidly connected to one port of the first plurality of ports of the first gas stick, and the second port being fluidly connected to one port of the second plurality of ports of the second gas stick. A thermally and vibrationally insulating mounting assembly may be used to mount the first and second gas sticks to a mounting plate.
    Type: Grant
    Filed: September 21, 2005
    Date of Patent: June 5, 2007
    Assignee: Celerity, Inc.
    Inventor: Kim Ngoc Vu
  • Patent number: 7222029
    Abstract: Embodiments of the present invention provide systems and methods for attitude insensitive flow devices. One embodiment of the present invention can include a flow device comprising a processor and a computer readable medium accessible by the processor that stores a set of computer instructions executable by the processor. The computer instructions can comprise instructions executable to receive an orientation, receive a sensed flow, and determine a flow through the flow device based on the sense flow and the orientation.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: May 22, 2007
    Assignee: Celerity, Inc.
    Inventor: Dwight S. Larson
  • Patent number: 7216019
    Abstract: Systems and methods for mass flow controllers which minimize false flow conditions and display a reduced sensitivity to pressure transients are disclosed. Pressure gradients that exist within the volume of a mass flow controller fluid path are minimized in order to limit the potential energy contained in compressed or pressurized process gas. Additionally, process gas pressure may be monitored using a pressure sensor. This pressure signal is utilized in conjunction with a control algorithm to cancel the detrimental effect of certain flow components. These mass flow controllers may be used as drop in replacements for legacy mass flow controllers and reduce the cost of gas sticks due to elimination of discrete components such as pressure regulators, gas filters, pressure transducers, local pressure displays, isolation valves, seals, etc.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: May 8, 2007
    Assignee: Celerity, Inc.
    Inventors: Kenneth E. Tinsley, Faisal Tariq
  • Publication number: 20070047933
    Abstract: A heater that includes a substantially flat layer of electrical resistance material having a first end and a second end, a first electrical conductor electrically connected to the first end of the substantially flat layer of electrical resistance material, a second electrical conductor electrically connected to the second end of the substantially flat layer of electrical resistance material, and an electrically insulating material surrounding the substantially flat layer of electrical resistance material and electrically insulating the first end of the substantially flat layer of electrical resistance material from the second end of the substantially flat layer of electrical resistance material. The heater may be mounted to a surface of a fluid component and used to heat the fluid component, and where the heater includes an aperture that extends through the electrically insulating material, the heater may be placed between a fluid component and a fluid substrate and used to heat both.
    Type: Application
    Filed: October 13, 2006
    Publication date: March 1, 2007
    Applicant: Celerity, Inc.
    Inventors: Michael Bower, Roger Chase
  • Publication number: 20070034016
    Abstract: An ultrasonic flow sensor that includes a conduit having a length, a first ultrasonic transducer disposed at a first position along the length of the conduit, a second ultrasonic transducer disposed at a second position along the length of the conduit, the second position being spaced apart from the first position, a first reflecting interface and a second reflecting interface. The first reflecting interface is in registration with the first ultrasonic transducer to receive first acoustic energy from the first ultrasonic transducer and to reflect the first acoustic energy in a direction generally along a length of the conduit and into a fluid within the conduit. The second reflecting interface is in registration with the second ultrasonic transducer to receive second acoustic energy from the second ultrasonic transducer and to reflect the second acoustic energy in a direction generally along the length of the conduit and into the fluid within the conduit.
    Type: Application
    Filed: August 10, 2006
    Publication date: February 15, 2007
    Applicant: Celerity, Inc.
    Inventors: Thomas Maginnis, Kim Vu
  • Patent number: 7150201
    Abstract: One embodiment of the present invention can comprise a primary flow measurement system, a secondary flow measurement system in fluid communication with the primary flow measurement system and a control coupled to the primary flow measurement system and the secondary flow measurement system. The controller can comprise a processor and a memory accessible by the processor. The processor can execute computer instructions stored on the memory to calculate a flow rate using the primary flow measurement system, in a first mode of operation, and calculate the flow rate using the secondary flow measurement system, in a second mode of operation. The computer instructions can be further executable to switch between the first mode of operation and the second mode of operation based on a predefined parameter.
    Type: Grant
    Filed: December 15, 2004
    Date of Patent: December 19, 2006
    Assignee: Celerity, Inc.
    Inventors: Stuart A. Tison, Shiliang Lu
  • Publication number: 20060272703
    Abstract: A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first predetermined portion of the flow of process fluid, and the at least one second fluid outlet provides the remaining portion of the flow of process fluid. In one embodiment, the control system includes a pressure transducer, first and second multipliers, and first and second flow controllers. The first multiplier multiplies a pressure signal received from the pressure transducer by a first setpoint to control a first flow controller that provides the first predetermined portion of the flow of process fluid. The second multiplier multiplies the pressure signal by a second setpoint to control a second flow controller that provides the remaining portion.
    Type: Application
    Filed: August 15, 2006
    Publication date: December 7, 2006
    Applicant: Celerity, Inc.
    Inventors: John Lull, William Valentine
  • Patent number: 7143774
    Abstract: A fluid flow control system that includes a fluid inlet to receive a flow of process fluid and a plurality of fluid outlets. The plurality of fluid outlets include a first fluid outlet and at least one second fluid outlet. The first fluid outlet provides a first predetermined portion of the flow of process fluid, and the at least one second fluid outlet provides the remaining portion of the flow of process fluid. In one embodiment, the control system includes a pressure transducer, first and second multipliers, and first and second flow controllers. The first multiplier multiplies a pressure signal received from the pressure transducer by a first setpoint to control a first flow controller that provides the first predetermined portion of the flow of process fluid. The second multiplier multiplies the pressure signal by a second setpoint to control a second flow controller that provides the remaining portion.
    Type: Grant
    Filed: July 5, 2005
    Date of Patent: December 5, 2006
    Assignee: Celerity, Inc.
    Inventors: John M Lull, William S Valentine
  • Patent number: 7131334
    Abstract: Embodiments of the present invention provide a diaphragm pressure gauge with an interface printed circuit board (“PCB”) contained in a reference pressure chamber of the diaphragm pressure gauge for receiving signals from one or more sensing elements in the reference pressure chamber. The sensing elements can comprise, for example, piezoelectric strain gauges, piezoresistive strain gauges, capacitor elements or other elements used in determining the deflection in the diaphragm. The interface PCB can be configured to connect the sensing elements to pass-through electrical connections in the housing of the reference pressure chamber. Thus, signals can be communicated from the sensing elements, through the interface board and out of the reference pressure chamber via the pass-through electrical connections.
    Type: Grant
    Filed: April 19, 2004
    Date of Patent: November 7, 2006
    Assignee: Celerity, Inc.
    Inventor: Hai Mei
  • Patent number: 7133785
    Abstract: Embodiments of the present invention provide a system and method of valve control that eliminates, or at least substantially reduces, the shortcomings of prior art valve control systems and methods. More particularly, embodiments of the present invention provide systems and methods for multi-channel valve control. One embodiment of the present invention includes a system of valve control that comprises a processor, a computer readable medium accessible by the processor and a set of computer instructions that are executable by the processor to output a first signal on a first channel indicating an initial force to be applied to a valve by an actuator and output a second signal on a second channel indicating a control force to be applied to the valve.
    Type: Grant
    Filed: July 8, 2004
    Date of Patent: November 7, 2006
    Assignee: Celerity, Inc.
    Inventors: Dwight S. Larson, Kenneth E. Tinsley, Faisal Tariq
  • Patent number: 7126094
    Abstract: A heater that includes a substantially flat layer of electrical resistance material having a first end and a second end, a first electrical conductor electrically connected to the first end of the substantially flat layer of electrical resistance material, a second electrical conductor electrically connected to the second end of the substantially flat layer of electrical resistance material, and an electrically insulating material surrounding the substantially flat layer of electrical resistance material and electrically insulating the first end of the substantially flat layer of electrical resistance material from the second end of the substantially flat layer of electrical resistance material. The heater may be mounted to a surface of a fluid component and used to heat the fluid component, and where the heater includes an aperture that extends through the electrically insulating material, the heater may be placed between a fluid component and a fluid substrate and used to heat both.
    Type: Grant
    Filed: November 5, 2004
    Date of Patent: October 24, 2006
    Assignee: Celerity, Inc.
    Inventors: Michael Joseph Bower, Roger Dean Chase
  • Patent number: 7124647
    Abstract: A flow restrictor (30) for a mass flow metering device formed of a solid material and slots (32) originating from an outer surface towards inward.
    Type: Grant
    Filed: May 23, 2003
    Date of Patent: October 24, 2006
    Assignee: Celerity, Inc.
    Inventors: Stuart A. Tison, Guanghua Wu, Tracy Gill, Vincent Lopez
  • Patent number: 7117104
    Abstract: An ultrasonic flow meter includes a conduit, a first ultrasonic transducer, a second ultrasonic transducer, and a controller. The first ultrasonic transducer is disposed at a first position about a first portion of the conduit to transmit a first ultrasonic signal and to receive a second ultrasonic signal. The second ultrasonic transducer is disposed at a second position about a second portion of the conduit that is spaced apart from the first position along a length of the conduit to transmit the second ultrasonic signal and to receive the first ultrasonic signal. The controller is configured to cross-correlate the first and second received ultrasonic signals and generate a resulting time-domain signal, analyze the resulting time-domain signal to determine a difference in transit time between the first and second received ultrasonic signals, and calculate a rate of flow of a fluid in the conduit based upon the determined difference.
    Type: Grant
    Filed: June 28, 2004
    Date of Patent: October 3, 2006
    Assignee: Celerity, Inc.
    Inventors: Nelson Urdaneta, Aaron S Tint, Hao Duan, Eric J Redemann, Christopher Andrew Wacinski
  • Patent number: 7113895
    Abstract: Embodiments of the present invention can include the steps of (i) filtering the indicated flow to derive an intermediate filtered indicated flow, (ii) deriving a weighted first derivative of the intermediate filtered indicated flow, and (iii) outputting a filtered indicated flow comprising the sum of the intermediate filtered indicated flow and the weighted first derivative of the intermediate filtered indicated flow. The indicated flow can be filtered using a FIR, an IIR a running average or other filtering scheme.
    Type: Grant
    Filed: August 26, 2004
    Date of Patent: September 26, 2006
    Assignee: Celerity, Inc.
    Inventor: Faisal Tariq
  • Patent number: 7082824
    Abstract: A resistive bridge sensor circuit that includes a first resistive bridge circuit having a first variable resistance resistor and a second resistive bridge circuit having a second variable resistance resistor. The first and second resistive bridge circuits share at least a portion of a common reference leg that sets a resistance of a first and second variable resistors. The common reference leg or a portion of the common reference leg is alternately switchably connected to one of the first and second resistive bridge circuits.
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: August 1, 2006
    Assignee: Celerity, Inc.
    Inventor: John Michael Lull
  • Patent number: 7073392
    Abstract: Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
    Type: Grant
    Filed: July 17, 2003
    Date of Patent: July 11, 2006
    Assignee: Celerity, Inc.
    Inventors: John Michael Lull, Chiun Wang, Joseph A. Saggio, Jr.
  • Patent number: 7073388
    Abstract: A variable capacitance measuring device can comprise a glass-ceramic insulator having a coefficient of thermal expansion that closely matches the coefficient of thermal expansion of a metallic materials used within the device. The glass-ceramic material may chemically bond to the surfaces of the metallic materials to provide a hermetic seal and eliminate the need for a separate glass seal or grooves within the electrode assembly. Additionally, a single-piece electrode assembly can be used instead of a separate electrode assembly (for the electrical feedthrough) and electrode. A shim may be used during the formation of the insulating material to reduce the likelihood of the insulator adhering to surfaces of the electrode portion during the manufacturing process. Also, separate bake-out and getter activation cycles may be combined into a single heat cycle.
    Type: Grant
    Filed: November 23, 2004
    Date of Patent: July 11, 2006
    Assignee: Celerity, Inc.
    Inventor: Hai Mei