Abstract: A method and an indenter for microscratch test of durability properties of the materials, including resistance of coating films to delamination. The blade-like indenter has a prism-like body defined by a front side, a rear side, a first lateral side, and a second lateral side. The first lateral side and the second lateral side converge and form at their intersection an edge that extends from the front side to the rear side. An angle between the edge and the front side is sharp, and an angle between the first lateral side and the second lateral side is rounded with a radius. During the test, the blade-like indenter is installed at selected angles of attack to the surface of the test material; a relative movement is created between the indenter and the test material with simultaneous mechanical, electrical, and acoustical measurements.

Abstract: An apparatus for controlling a polishing process, in particular for detecting an end point of the polishing process, comprising a rotating or orbiting platen with a pad, a rotating head that supports an object to be treated, e.g., a semiconductor wafer, and performs radial movements with respect to the platen, and a polishing process control system comprising a plurality of groups of various sensing devices for detecting an end point of the process. In the illustrated embodiment one group of the sensing devices is a group of high-frequency acoustic emission sensors built on various levels into components of the rotating head. Another group of sensing devices is represented by force/torque sensors connected with various elements of the rotating head and the platen, respectively, and intended for direct measurement of compression force and friction response (force or torque) between the head and the platen and a coefficient of friction between the wafer and the polishing pad.

Abstract: A universal friction tester for testing tribological properties of materials comprises a frame with a carriage sliding in vertical guides and supporting a slide moveable in a horizontal direction. The slide supports a stationary upper specimen, which engages a moveable lower specimen, located in a replaceable module attachable to a base plate of the frame. The modules may be of a rotary, reciprocating, a block-on-ring, or any other type, required for different test conditions. Testing can also be carried out with heating or with the supply of oil in the zone of contact between the specimens.

Abstract: The sensor of the invention comprises a flexible beam of a rectangular cross section with rigid solid end blocks at both ends for securing the sensor in a tester. The beam has two symmetrically-shaped through slots cut in mutually perpendicular directiors so that they are partially intersect within a body of the beam. Each slot has at its opposite ends notches which are wider than the slots so that the distance from the inner wall of the notch to the outer side surface of the beam is shorter than the distance to this surface from the inner wall of the slot. Strain gauges are attached to mutually perpendicular surfaces at the ends of the beam which are flexible in the direction of the force being measured and are rigid in the perpendicular direction. Under effect of the loading force and of the friction force, the flexible beam acts as a pair of overlapped and mutually perpendicular parallelograms.

Abstract: An apparatus for controlling a polishing process, in particular for detecting an end point of the polishing process, comprising a rotating platen with a pad, a rotating head that supports an object to be treated, e.g., a semiconductor wafer, and performs radial movements with respect to the platen, and an end-point control system comprising a plurality of groups of various sensing devices for detecting an end point of the process. In the illustrated embodiment one group of the sensing devices is a group of electrical-conductive elements located on the surface of the pad and connected via contact pins embedded in the material of the platen to respective resistance measurement unit. A second group of sensing elements is represented by capacitance probes having conductive elements on the surface of the pad and connected via contacts embedded in the body of the platen to the capacitance measurement unit.

Abstract: A tester of the invention has a horizontal base with a vertical column that supports vertical guides for guiding a carriage that supports a rotary drive mechanism for an upper specimen which is secured in a chuck and engages a lower specimen supported by an interchangeable bowl. The tester is also provided with a computerized measuring system for precisely measuring characteristics to be tested. The main distinguishing feature of the tester of the invention is a that a flexible coupling that may have at least one degree of freedom (preferably three) is installed in a link between a rotary motion unit and the chuck for fixing the upper specimen. In other words, the upper specimen is fixed in a self-aligning manner so that its flat working surface is always maintained in full surface-to-surface contact with the lower specimen.