Abstract: A method for chemical vapor deposition of a polymer film onto a substrate (6), includes the following two separate, consecutive steps:—a step for the photon activation of the gas phase wherein photon activation energy (42, 43) is provided to at least one gaseous polymer precursor that is present in a mainly gaseous composition, and—a chemical vapor deposition step wherein the activated gaseous polymer precursor, from the photon activation step, is deposited onto a substrate (6) so as to form a polymer film on the substrate, the total gas phase pressure ranging from 102 to 105 Pa. A device (1) for using such a method is also described.
Type:
Application
Filed:
September 6, 2010
Publication date:
July 12, 2012
Applicants:
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFI, ESSILOR INTERNATIONAL (Compagnie Generale d'Optique
Inventors:
Claudine Biver, Francis Maury, Virginie Santucci, François Senocq, Sylvie Vinsonneau