Patents Assigned to CEOS Corrected Electron Optical Systems GmbH
  • Electron/ion gun for electron or ion beams with high monochromasy or high current density
    Patent number: 6770878
    Abstract: The invention relates to an electron/ion gun for electron or ion beams, including a beam source and a monochromator. According to the invention, the monochromator is equipped with an additional beam guidance system and a switchover element which are provided at the input of the monochromator, and which convey the particles coming from the beam source to either the monochromator or the rest of the beam guidance system.
    Type: Grant
    Filed: October 25, 2002
    Date of Patent: August 3, 2004
    Assignee: CEOS Corrected Electron Optical Systems GmbH
    Inventors: Stephan Uhlemann, Maximilian Haider