Abstract: This invention relates to a planetary grinding or polishing machine wherein the outer ring gear, the upper platen, and the lower platen are independently rotatable in the clockwise or counterclockwise directions at variable speeds. Such grinding or polishing is especially useful in high precision finishing of aluminum, nickel plated, and ceramic substrates where uniform and non-uniform surface finishes are required from surface-to-surface in the workpiece.
Type:
Grant
Filed:
October 18, 1995
Date of Patent:
December 16, 1997
Assignee:
Cerion Technologies, Inc.
Inventors:
David Greenlaw, William A. Hughes, Terry Hickman, John Berbaum, Clyde Marchand