Abstract: A method of forming a radiation detector includes forming a stack including a plurality of arrays of radiation detection devices. Forming an array of the plurality of arrays includes forming a polysilicon layer over an interlayer dielectric layer of another array of the plurality of arrays; forming charge storage layers over the polysilicon layer; forming a second polysilicon layer over the charge storage layers; etching the second polysilicon layer to form gate stacks; and depositing an interlayer dielectric disposed on at least three sides of the gate stacks, the interlayer dielectric including a radiation reactive material.
Type:
Grant
Filed:
April 22, 2020
Date of Patent:
December 19, 2023
Assignee:
CERIUM LABORATORIES LLC
Inventors:
Tim Z Hossain, Mark Clopton, Clayton Fullwood
Abstract: A method of preparing a surface includes applying rough material layer to a surface of a support material. The rough material layer has a thickness in a range of 50 nm to 5 micrometers and a roughness Ra in a range of 10 nm to 1 micrometer. The method includes depositing a ceramic nitride or oxynitride over the rough material layer. In an example, a vehicle includes a structural support and a component comprising a support material defining an exterior facing surface and a ceramic nitride or oxynitride layer disposed over the support material.
Abstract: A method of testing for impurities includes directing an x-ray source toward a surface at an angle ? relative to the plane of the surface, the surface defined by a ceramic coating over a crystalline substrate; detecting x-ray fluorescent radiation emitted from the ceramic coating at an angle ? different from the angle ? and its supplementary angle; and comparing characteristics of the detected x-ray fluorescent radiation to characteristics associated with impurities.