Abstract: A vacuum deposition apparatus comprises a cabinet having a vacuum chamber defined therein. A door is movably mounted on the cabinet for movement between a closed position fully sealing an opening to the vacuum chamber and an opened position fully exposing the opening. The door is preferably mounted on the cabinet for swinging movements towards and away from the opening and for vertical sliding movements whereby the door may be moved downwardly to a remote position. The door is preferably counterweighted to facilitate its vertical sliding movements and is pivotally mounted on a bracket by self-centering bearing assemblies which are pre-adjusted to continuously insure a positive static seal as between the door and the opening to the vacuum chamber.

Abstract: A thin-film deposition apparatus comprises a cabinet having a vessel mounted therein which defines a vacuum chamber adapted to retain processed articles. A vacuum unit is mounted adjacent to the vessel to communicate in substantially unrestricted communication with an inlet opening to the vacuum chamber for selectively evacuating the same. A valve is reciprocally mounted in a chamber communicating with the inlet opening to selectively expose the inlet opening during the evacuation process. A plurality of water-cooled and V-shaped baffles or a primary trap is mounted between the piston and the vacuum unit to provide an optically dense view of the vacuum chamber from the downstream side of the trap and to trap contaminants, such as oil droplets, prior to their ingress into the vacuum chamber from the vacuum unit. In addition, a plurality of fins or a secondary trap is mounted in nesting relationship within the baffles to provide an optically dense view of the primary trap from the vacuum chamber side thereof.

Abstract: A thin-film deposition apparatus comprises a cabinet having a vessel mounted therein which defines a vacuum chamber adapted to retain processed articles. A vacuum unit is mounted in the cabinet to communicate with an opening defined in the vacuum chamber whereby the chamber may be evacuated upon actuation of the pump of the vacuum unit. A door is movably mounted on a front panel of the cabinet for movement between closed and opened positions and a fan is preferably mounted on the cabinet and above the door to blow a laminar airflow over the front panel of the cabinet.

Abstract: A thin-film deposition apparatus includes a rotatable assembly, and a plurality of arms of generally T-shaped configuration, each having a rack rotatably mounted thereto. The arms are mountable to the rotatable assembly by seating of the oppositely extending limbs of each T-shaped arm into generally U-shaped depressions defined by the rotatable assembly.

Abstract: The invention is concerned with an improved creep resistant sealing arrangement for a bell jar which is used in vacuum work. The bell jar generally consists of a closed top cylindrical container having an open bottom defining a planar rim. The rim generally seats against a flat surface with a gasket between the rim and the surface. A vacuum source communicates with the interior of the bell jar. The sealing arrangement of the present invention comprises a unitary resilient elastomeric ring having a generally J-shaped cross-section, an outer leg of which fits against the outside of the bell jar, an inner leg of which fits against the inside of the bell jar and a cross member of which fits against the rim of the bell jar. Also part of the sealing arrangement is means for fastening the outer leg radially against the outside of the bell jar.

Abstract: A unique device for flash evaporating a material within a vacuum chamber. The device includes a pair of electrodes one of which is grounded and the other of which is connected to a power supply and a resistively heated boat which forms the electrical path between the two electrodes. A wire feed assembly which serves to feed wire onto the boat is supported adjacent the boat and adjacent the two electrodes. A single stream of coolant liquid is passed internally through the grounded electrode, the non-grounded electrode and the support, while each of these is maintained in electrical isolation from one another.