Abstract: A back-end-of-line (BEOL) interconnect structure and a method of forming an interconnect structure. The interconnect structure comprises a conductor, such as copper, embedded in a dielectric layer, and a low-k dielectric capping layer, which acts as a diffusion barrier, on the conductor. A method of forming the BEOL interconnect structure is disclosed, where the capping layer is deposited using plasma-enhanced chemical vapor deposition (PECVD) and is comprised of Si, C, H, and N. The interconnect structure provides improved oxygen diffusion resistance and improved barrier qualities allowing for a reduction in film thickness.