Patents Assigned to Chartered Semiconductor Mfg. Ltd.
  • Publication number: 20040155269
    Abstract: An integrated circuit, and manufacturing method therefor, is provided. A gate dielectric and a gate are provided respectively on and over a semiconductor substrate. A junction is formed adjacent the gate dielectric and a shaped spacer is formed around the gate. A spacer is formed under the shaped spacer and a liner is formed under the spacer. A first dielectric layer is formed over the semiconductor substrate, the shaped spacer, the spacer, the liner, and the gate. A second dielectric layer is formed over the first dielectric layer. A local interconnect opening is formed in the second dielectric layer down to the first dielectric layer. The local interconnect opening in the first dielectric layer is opened to expose the junction in the semiconductor substrate and the first gate. The local interconnect openings in the first and second dielectric layers are filled with a conductive material.
    Type: Application
    Filed: February 7, 2003
    Publication date: August 12, 2004
    Applicant: Chartered Semiconductor Mfg. Ltd.
    Inventors: Pradeep Ramachandramurthy Yelehanka, Tong Qing Chen, Zhi Yong Han, Jia Zhen Zheng, Kelvin Ong, Tian Hao Gu, Syn Kean Cheah