Abstract: The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a wide-field scanning probe microscope combined with an apparatus for modifying an object, said microscope comprising a base on which a piezo-scanner unit having a piezo scanner, a probe unit having a probe holder, and a punch unit having a punch are movably mounted, a punch actuator is configured as a three-axis actuator, allowing the punch to move along a first axis X, a second axis Y and a third axis Z; and the probe unit is mounted on the punch actuator. The invention is aimed at simplifying the structure of the device by combining into one unit means for measuring and means for modifying an object. The technical result of the invention consists in increasing measurement resolution.
Type:
Grant
Filed:
May 18, 2017
Date of Patent:
February 1, 2022
Assignee:
Chastnoe Uchrezhdenie Nazarbayev University Research and
Innovation System
Inventors:
Alexander Mihaylovich Alekseev, Aleksey Dmitrievich Volkov, Dmitry Yurjevich Sokolov, Anton Evgenievich Efimov
Abstract: The invention relates to the field of probe measurements of objects after micro- and nano-sectioning. The essence of the invention consists in that in a wide-field scanning probe microscope combined with an apparatus for modifying an object, said microscope comprising a base on which a piezo-scanner unit having a piezo scanner, a probe unit having a probe holder, and a punch unit having a punch are movably mounted, a punch actuator is configured as a three-axis actuator, allowing the punch to move along a first axis X, a second axis Y and a third axis Z; and the probe unit is mounted on the punch actuator. The invention is aimed at simplifying the structure of the device by combining into one unit means for measuring and means for modifying an object. The technical result of the invention consists in increasing measurement resolution.
Type:
Application
Filed:
May 18, 2017
Publication date:
July 18, 2019
Applicant:
Chastnoe Uchrezhdenie "Nazarbayev University Research and Innovation System"
Inventors:
Alexander Mihaylovich ALEKSEEV, Aleksey Dmitrievich VOLKOV, Dmitry Yurjevich SOKOLOV, Anton Evgenievich EFIMOV
Abstract: A scanning probe microscope combined with a device for acting on a probe and a specimen relates to measurement technology, more specifically to devices for measuring objects by probe methods after nano-sectioning. Same can be used for studying the structures of biological and polymeric specimens under low-temperature conditions. The aim of the invention is to raise the operating efficiency of elements of the measurement unit of a scanning probe microscope which is combined with a device for acting on a probe and a specimen.
Type:
Application
Filed:
May 18, 2017
Publication date:
July 18, 2019
Applicant:
Chastnoe Uchrezhdenie "Nazarbayev University Research and Innovation System"
Inventors:
Alexander Mihaylovich ALEKSEEV, Aleksey Dmitrievich VOLKOV, Dmitry Yurjevich SOKOLOV, Anton Evgenievich EFIMOV