Patents Assigned to Chem First Electronic Materials L.P.
  • Anhydrous, liquid phase process for preparing hydroxyl containing polymers of enhanced purity
    Patent number: 6864324
    Abstract: An anhydrous, liquid phase process for preparing hydroxyl containing polymers of enhanced purity comprising the steps of polymerization, purification, transesterification, purification, catalyst removal, and solvent exchange. The resultant polymer in solution can be used directly, without further processing steps, to prepare a photoresist composition.
    Type: Grant
    Filed: April 19, 2002
    Date of Patent: March 8, 2005
    Assignee: Chem First Electronic Materials L.P.
    Inventors: Michael T. Sheehan, James R. Sounik