Patents Assigned to CHEN
  • CARRIER HEAD WITH A SUBSTRATE DETECTOR
    Publication number: 20020002025
    Abstract: A carrier head has a base, a flexible membrane, and a valve in the carrier head that forms part of a substrate detection system. The valve includes a valve stem that contacts an upper surface of the flexible membrane so that if a substrate is attached to the lower surface of the flexible membrane when the first chamber is evacuated, the valve is actuated to generate a signal to the substrate detection system.
    Type: Application
    Filed: November 17, 1999
    Publication date: January 3, 2002
    Applicant: CHEN
    Inventors: HUNG CHIH CHEN, MICHAEL TSENG, STEVEN M. ZUNIGA