Abstract: A rotor 10 rotatable around a predetermined centerline direction includes: a columnar magnet 12; and a first rotating shaft 70 with a first columnar part 71 and a cylinder-shaped first cylindrical part 72 covering a part of a first outer circumferential surface 913 of the magnet 12, wherein the first outer circumferential surface 913 of the magnet 12 and a first inner circumferential surface 721 of the first cylindrical part 72 of the first rotating shaft 70 are joined, and a first end surface 912 of the magnet 12 and a first end surface 731 of the first rotating shaft 70 are not joined.

Abstract: The range of operating angles of a position transducer is widened, and its signal-to-noise ratio is improved. The position transducer includes a light source and a detector including at least one pair of photodiodes (PDs) disposed on a predetermined circle. The detector receives light emitted from the light source to output a signal varying depending on the areas of regions where the light is received on two PDs forming a pair. The PDs are formed on separate chips, respectively, and the chips are disposed on a substrate so that one or more pairs of PDs surround the entirety of a predetermined region and have an annular shape as a whole.

Abstract: Provided is a position transducer which can be manufactured at low cost, improve the signal-to-noise ratio of an output obtained from a detector, and obtain a stable output even if the temperature changes. A position transducer 100 includes a butterfly-shaped reflector 7 attached to a rotating shaft 2 of a rotation restriction motor 1, an LED die 4 disposed to face a central portion of the reflection surface of the reflector 7, a diffused-light absorbing member disposed on the surfaces of a diffused light absorber 3 and a case 5, installed on the fixed side of the motor 1 so as to surround the reflector 7 with a distance from the reflector 7 at the rear of the reflector 7 as viewed from the LED die 4 and absorbing illumination light from the LED die 4 which has not illuminated the reflection surface, and detectors 11 mounted on the same printed circuit board 6 as the LED die 4 to detect an image reflected by the reflector 7.

Abstract: A common electrode plate formed on a common electrode base attached to the lower surface of the movable stage faces a split electrode plate formed on a split electrode base attached to the upper surface of a main base, which are apart from each other at a predetermined interval. A support mechanism formed of ball bearings, ball stoppers at the movable side, steel balls, ball stoppers at the fixed side, and ball bearings allows the movable stage to move in directions of the X-axis, Y-axis and turning. A linear actuator 19 is driven to move the movable stage in the directions of X-axis, Y-axis, and turning.

Abstract: A common electrode plate formed on a common electrode base attached to the lower surface of the movable stage faces a split electrode plate formed on a split electrode base attached to the upper surface of a main base, which are apart from each other at a predetermined interval. A support mechanism formed of ball bearings, ball stoppers at the movable side, steel balls, ball stoppers at the fixed side, and ball bearings allows the movable stage to move in directions of the X-axis, Y-axis and turning. A linear actuator 19 is driven to move the movable stage in the directions of X-axis, Y-axis, and turning.

Abstract: A planar motor permits a thinner design, controlled vibration, and highly accurate positioning by disposing X-axis and Y-axis coreless type linear motors on the same plane without using an expensive linear guide and by incorporating high-accuracy capacitance displacement sensors in X and Y directions. Two pairs of permanent magnets are disposed such that they are respectively orthogonalized with respect to two axes that are orthogonalized with each other on a movable stage and that they generate magnetic fluxes in a direction perpendicular to a surface of the movable stage. Furthermore, the permanent magnets of one pair are disposed symmetrically to each other about one of the two axes, while those of the other pair are disposed symmetrically to each other about the other axis. Two pairs of coils are provided such that they oppose and match the two pairs of permanent magnets.

Abstract: A planar motor permits a thinner design, controlled vibration, and highly accurate positioning by disposing X-axis and Y-axis coreless type linear motors on the same plane without using an expensive linear guide and by incorporating high-accuracy capacitance displacement sensors in X and Y directions. Two pairs of permanent magnets are disposed such that they are respectively orthogonalized with respect to two axes that are orthogonalized with each other on a movable stage and that they generate magnetic fluxes in a direction perpendicular to a surface of the movable stage. Furthermore, the permanent magnets of one pair are disposed symmetrically to each other about one of the two axes, while those of the other pair are disposed symmetrically to each other about the other axis. Two pairs of coils are provided such that they oppose and match the two pairs of permanent magnets.

Abstract: In an aerostatic gas bearing, slot sections can be easily processed, bearing stiffness and a load capacity can be improved, and an amount of gas flow can be greatly reduced as compared with a conventional circular slot restriction bearing. A multiplicity of radial slots are formed on both the end surfaces of a bearing member. A bearing housing is assembled by fixing slot side plates on both the side surfaces thereof and accommodated in a casing, and a shaft having an outside diameter slightly smaller than the inside diameter of the bearing housing is inserted through the bearing housing. Gas is fed from a gas feed port and flown into a multiplicity of slots through a peripheral groove and fed-gas introduction path. The gas flows into the radial bearing clearance between the shaft and the inner peripheral surface of the bearing housing, thereby the shaft is rotatably supported.